Piezoelectric exciter with single-sided lead wire structure, and fabrication method of piezoelectric exciter

Abstract

The invention discloses a piezoelectric exciter with a single-sided lead wire structure, which comprises a piezoelectric patch, and electrodes and electrode lead wires which are bonded on the upper surface and the lower surface of the piezoelectric patch, wherein the original upper electrode is divided into two asymmetric electrodes; the larger one forms an upper working electrode; the smaller one is communicated with the original lower electrode by silver paste to form a lower lead wire electrode; and the piezoelectric exciter is located on the lower surface of a vibrating membrane. The invention further discloses a fabrication method of the piezoelectric exciter, which comprises the steps that the upper electrode is divided into the two asymmetric electrodes by wet etching; the piezoelectric patch is bonded with a silicon wafer together; the piezoelectric patch is thinned by a chemical mechanical method; the lower electrode is deposited on the lower surface of the piezoelectric patch by adopting a low-pressure chemical vapor deposition method; the smaller electrode divided by the upper electrode is communicated with the original lower electrode by the silver paste to form the lower lead wire electrode; and the lead wires are welded on the upper and lower electrodes. The upper and lower electrode lead wires are in the same fixed plane, so that the problems that the electrodes are short-circuit and the lead wires drop during periodic vibration of the membrane are solved, and the reliability of a piezoelectric synthetic jet device is improved.

Description

technical field [0001] The invention relates to a piezoelectric actuator with a single-sided lead structure, and also relates to a manufacturing method of the piezoelectric actuator. Background technique [0002] Piezoelectric excitation is a common driving method in MEMS. Some piezoelectric actuators that appear at present attach the upper and lower electrodes to the upper and lower surfaces of the piezoelectric sheet respectively, and then weld the lead wires to the upper and lower electrodes respectively. The piezoelectric actuator is bonded to the elastic diaphragm, and the periodic voltage signal is applied to the upper electrode and the lower electrode through the lead wire, and the piezoelectric sheet produces periodic longitudinal deformation, which drives the diaphragm to vibrate and completes the drive. However, due to the characteristics of the MEMS processing technology and the device, the lead wire of the lower electrode will contact the upper electrode due to ...

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the shortcomings of the existing piezoelectric actuators, the upper and lower electrodes are easy to short circuit and the lead wires of the lower electrodes are easy to fall off, the present invention provides a piezoelectric actuator with a single-sided lead wire structure and its manufacturing method

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