Shaking-quality bulk acoustic wave solid-fluctuation microgyroscope driving and detecting circuit

A detection circuit and bulk acoustic wave technology, applied in the direction of steering sensing equipment, etc., can solve the problems of no detailed implementation mode and no implementation plan for each module, so as to overcome frequency drift and amplitude change, avoid tediousness, and simple method effective effect

Active Publication Date: 2013-10-09
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, the closed-loop described in the literature is only a single closed-loop working method to ensure stable amplitude, and no specific implementation is given, and there is no detailed implementation of each module

Method used

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  • Shaking-quality bulk acoustic wave solid-fluctuation microgyroscope driving and detecting circuit
  • Shaking-quality bulk acoustic wave solid-fluctuation microgyroscope driving and detecting circuit
  • Shaking-quality bulk acoustic wave solid-fluctuation microgyroscope driving and detecting circuit

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Embodiment Construction

[0051] The present invention will be described in detail below in conjunction with specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

[0052] Such as figure 1 As shown, this embodiment provides a driving and detection circuit for a rocking mass acoustic wave solid wave micro-gyro based on an embedded system, including an embedded core part 1, a rocking mass acoustic wave solid wave micro gyroscope 2, a non-inverting amplifier 3, an inverting Amplifier 4, charge amplifier 5, phase shifter 6, instrumentation amplifier 7 and computer interface 8.

[0053] In this embodiment, the embedded core part 1 includes an embedded CPU 101, a ...

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Abstract

The invention provides a shaking-quality bulk acoustic wave solid-fluctuation microgyroscope driving and detecting circuit, which comprises an embedded core part, a peripheral circuit part, a shaking-quality bulk acoustic wave solid-fluctuation microgyroscope part and a computer display part, wherein the embedded core part is connected with the peripheral circuit part, then is connected with the shaking-quality bulk acoustic wave solid-fluctuation microgyroscope part, and finally returns through the peripheral circuit part; meanwhile, the embedded core part is directly connected and is communicated with the computer display part in real time; the driving and defection for the gyroscope are mainly completed at the embedded core part, the peripheral circuit part plays a helping role, and therefore the gyroscope is controlled and is sensitive to output. The circuit can provide a stable and effective driving signal for the shaking-quality bulk acoustic wave solid-fluctuation microgyroscope, ensures that the gyroscope is in a resonant state at all time, effectively realizes the feedback mechanism of gyroscope driving and detection, forms a closed-loop system, and detects a gyroscope signal.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems, in particular to a driving and detection circuit for a shaking mass acoustic wave solid wave micro-gyroscope based on an embedded system. Background technique [0002] Micromechanical electronic system (MEMS) mainly includes several parts such as micro-mechanism, micro-sensor, micro-actuator and corresponding processing circuit. MEMS has gradually become a high-tech frontier subject based on the latest achievements in the field of electronic communication and microelectronics technology by using various processing technologies, especially micro-processing technology. The micro gyroscope is the core device of the inertial system, occupies an important position in the micro mechanical and electronic system, and has a wide range of applications in aerospace, maritime navigation, military guidance and other civilian fields. [0003] The rocking mass acoustic wave solid wave ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/56
Inventor 张卫平张弓汪濙海成宇翔许仲兴唐健陈文元
Owner SHANGHAI JIAO TONG UNIV
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