Shaking-quality bulk acoustic wave solid-fluctuation microgyroscope driving and detecting circuit

Abstract

The invention provides a shaking-quality bulk acoustic wave solid-fluctuation microgyroscope driving and detecting circuit, which comprises an embedded core part, a peripheral circuit part, a shaking-quality bulk acoustic wave solid-fluctuation microgyroscope part and a computer display part, wherein the embedded core part is connected with the peripheral circuit part, then is connected with the shaking-quality bulk acoustic wave solid-fluctuation microgyroscope part, and finally returns through the peripheral circuit part; meanwhile, the embedded core part is directly connected and is communicated with the computer display part in real time; the driving and defection for the gyroscope are mainly completed at the embedded core part, the peripheral circuit part plays a helping role, and therefore the gyroscope is controlled and is sensitive to output. The circuit can provide a stable and effective driving signal for the shaking-quality bulk acoustic wave solid-fluctuation microgyroscope, ensures that the gyroscope is in a resonant state at all time, effectively realizes the feedback mechanism of gyroscope driving and detection, forms a closed-loop system, and detects a gyroscope signal.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems, in particular to a driving and detection circuit for a shaking mass acoustic wave solid wave micro-gyroscope based on an embedded system. Background technique [0002] Micromechanical electronic system (MEMS) mainly includes several parts such as micro-mechanism, micro-sensor, micro-actuator and corresponding processing circuit. MEMS has gradually become a high-tech frontier subject based on the latest achievements in the field of electronic communication and microelectronics technology by using various processing technologies, especially micro-processing technology. The micro gyroscope is the core device of the inertial system, occupies an important position in the micro mechanical and electronic system, and has a wide range of applications in aerospace, maritime navigation, military guidance and other civilian fields. [0003] The rocking mass acoustic wave solid wave ...

AI Technical Summary

Problems solved by technology

However, the closed-loop described in the literature is only a single closed-loop working method to ensure stable amplitude, and no specific implementation is given, and there is no detailed implementation of each module

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