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Noise reduction method and electronic cirucit based on merged MEMS accelerometer sensor chopping

A sensor circuit, electronic circuit technology, applied in the direction of testing/calibration of speed/acceleration/shock measurement equipment, measurement of acceleration, speed/acceleration/shock measurement, etc.

Active Publication Date: 2013-10-23
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The design of these sensing circuits presents challenges for noise reduction and size minimization

Method used

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  • Noise reduction method and electronic cirucit based on merged MEMS accelerometer sensor chopping
  • Noise reduction method and electronic cirucit based on merged MEMS accelerometer sensor chopping
  • Noise reduction method and electronic cirucit based on merged MEMS accelerometer sensor chopping

Examples

Experimental program
Comparison scheme
Effect test

example 1

[0033] Example 1 can include or use a subject matter (eg, an apparatus) that includes a capacitance-to-voltage conversion circuit configured to electrically connect to a MEMS sensor circuit. The capacitance-to-voltage conversion circuit may include a differential chopper circuit path and a differential sigma-delta analog-to-digital converter (ADC) circuit, wherein the differential chopper circuit path is configured to receive a differential MEMS sensor output signal and convert the the polarity of the differential chopper circuit path is reversed; the differential sigma-delta analog-to-digital converter (ADC) circuit is configured to sample the differential MEMS sensor output signal and provide a signal representing a change in capacitance in the MEMS sensor Digital signal.

[0034] In Example 2, the subject matter of Example 1 optionally includes: a differential sigma-delta ADC circuit and a pseudorandom noise generating circuit, wherein the differential sigma-delta ADC circu...

example 10

[0042] Example 10 may include the following subject matter (such as an apparatus) or optionally combine said subject matter of one or any combination of Examples 1 to 9 to include the following subject matter: comprising: configured to be electrically connected to a MEMS sensor circuit Capacitance-to-voltage conversion circuit. The capacitance-to-voltage conversion circuit may include a differential circuit path and a differential sigma-delta ADC circuit, wherein the differential circuit path is configured to receive a differential MEMS sensor output signal, and the differential sigma-delta ADC circuit is configured to The differential MEMS sensor output signal is sampled and a digital signal representing a change in capacitance in the MEMS sensor is provided. The differential sigma-delta ADC circuit may include a comparator circuit, and the capacitance-to-voltage conversion circuit may include a pseudorandom noise generation circuit, wherein the pseudorandom noise generation ...

example 14

[0046] Example 14 may include the following subject matter (such as a method, means for performing an action, or a machine-readable medium containing instructions that, when executed by a machine, cause the machine to perform the action) or alternatively with Examples 1 to 13 The subject matter of one example or any combination of examples are combined to include the following subject matter: comprising: sensing the output of a MEMS sensor to generate a differential sensor output signal; adding the output of the MEMS sensor to a differential chopper circuit path, Wherein, inverting the polarity of the path of the differential chopper circuit at time intervals; and sampling the chopped output signal of the MEMS sensor to generate a digital signal representing a capacitance change in the MEMS sensor. These subject matter may include methods of sensing an output of a MEMS sensor to produce a differential sensor output signal, an illustrative example of which may include a charge-t...

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PUM

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Abstract

The invention dislcoses a noise reduction method and an electronic cirucit based on merged MEMS accelerometer sensor chopping. An apparatus includes a capacitance-to-voltage converter circuit configured to be electrically connected to a micro-electromechanical system (MEMS) sensor circuit. The capacitance-to-voltage converter circuit includes a differential chopping circuit path configured to receive a differential MEMS sensor output signal and invert a polarity of the differential chopping circuit path, and a differential sigma-delta analog to digital converter (ADC) circuit configured to sample the differential MEMS sensor output signal and provide a digital signal representative of a change in capacitance of the MEMS sensor.

Description

technical field [0001] The present invention relates generally to electronic circuits, and more particularly to MEMS sensor circuits. Background technique [0002] Microelectromechanical systems (MEMS) include small mechanical devices that perform electrical and mechanical functions, fabricated by photolithographic techniques similar to those used to fabricate integrated circuits. Some MEMS devices are sensors that detect motion, such as accelerometers, or sensors that detect angular velocity, such as gyroscopes. An accelerometer is a device that undergoes a measurable change in response to acceleration acting on it. MEMS accelerometers include piezoelectric accelerometers, piezoresistive accelerometers, and capacitive accelerometers. Due to their small size, MEMS sensors are included in electronic devices such as video game controllers and smartphones. [0003] In response to acceleration, the capacitance of a capacitive accelerometer changes. Sensing circuits are used ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03M3/04
CPCH03M3/04H03M3/344G01P15/125G01P21/025B81B7/0038
Inventor 乔纳森·亚当·克莱克斯约恩·奥普里斯贾斯廷·森
Owner QST CORP
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