Dual-Plate Polarization Phase-Shifting Shearing Interferometer

Abstract

A double-plate polarization phase-shifting shearing interferometer is characterized by comprising a first polarization beam-splitting shearing plate, a second polarization beam-splitting shearing plate, a polarization phase shifter, an image sensor and a computer, wherein the first polarization beam-splitting shearing plate and the second polarization beam-splitting shearing plate are identical. The double-plate polarization phase-shifting shearing interferometer has the advantage of aplanatic common-path interference, and is simple and compact in structure and not easily affected by environments.

Description

technical field [0001] The invention relates to the field of optical measurement, and relates to a double-plate polarization phase-shifting shear interferometer. Background technique [0002] Wavefront measurement technology is widely used in optical processing, laser communication, sensor detection and other fields. It uses the change of the wave front to reflect the relevant characteristics of the medium or system through which the light wave passes, and then can obtain a variety of relevant information about the medium or system. The wave surface measurement is usually realized by the shear interferometry method, which interferes the measured wave surface with the wave surface that is cut and copied, and unwraps the interferogram to reconstruct the wave surface. This method does not require a standard reference surface, and its structure is simple and compact. ,Stablize. The phase-shifting shearing interferometry technique is formed by introducing phase shifting, which ...

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Problems solved by technology

[0003] State-of-the-art technology [1] (Liu Xiaojun, Zhang Ming, Li Zhu. "Development of a common-path phase-shifting shear interferometer". Journal of Huazhong University of Science and Technology, 27(3): 16-18(1999)) using the optical axis and the surface The birefringence effect of parallel uniaxial crystal plates realizes common optical path transverse shear interference, but cannot satisfy equal optical path interference, and is not suitable for measuring the wavefront of low coherence light sources

[0004] Prior technology [2] (Luan Zhu, Liu Liren, Liu De'an, Teng Shuyun. "Double Shear Wave Surface Interferometry". Acta Optics Sinica, 24(10): 1417-1420(2004)) used Yaman parallel plate for beam splitting, and was The four wedge plates are cut separately and then combined by another Yaman parallel plate for interference. The interferometer can achieve almost equal optical path interference, but the interferometer splits the optical path for shear interference and is sensitive to environmental vibrations.

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