Parallel scanning laser pretreatment device and method
A preprocessing device and laser preprocessing technology, applied in the optical field, can solve the problems of uncontrollable component preprocessing, uneven irradiation, and inability to monitor scanning points in real time, achieve compressed preprocessing time period, and solve the problem of uneven reflected irradiation Uniform, enhanced laser damage threshold effect
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[0026] Below in conjunction with embodiment the present invention is further described.
[0027] see figure 1 ---4, parallel scanning laser preprocessing device, including laser light source 1, mechanical shutter 2, energy attenuator 3, beam converging system 4, beam splitter 5 and beam combiner 13 arranged along the laser transmission direction, and also includes a beam profiler 6. Laser energy meter 7, beacon light source 8 and electric displacement stage 12; optical element 11 is placed on electric displacement stage 12; a tilting mirror array 9 is arranged between the device and optical element 11, and a detection camera is arranged in front of optical element 11 10.
[0028] The laser light source 1 is a Q-switched solid-state laser. The beacon light source 8 is a helium-neon laser. The mirror surface of the tilting mirror array 9 is a concave mirror coated with a high reflection film.
[0029] The angle (degree of freedom) control of the tilting mirror array 9 is dri...
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