Installation and adjustment device for exposure light path of holographic variable pitch grating

Abstract

The invention discloses an adjustment device of a holographic variable-interval grating exposure light path, and belongs to the technical field of spectrums. The adjustment device aims at solving the problems that in the existing adjustment process of a holographic variable-interval grating exposure system, the detection difficulty is high and the detection accuracy is low. The adjustment device comprises a detection light source and a grating substrate clamping detection platform. The detection light source is used for providing two beams of coherent parallel light and is composed of a laser device, an incoming optical fiber collimating lens, a Y-type single mode fiber, a first outgoing optical fiber collimating lens and a second outgoing optical fiber collimating lens, lasers generated by the laser device are converged through the incoming optical fiber collimating lens to enter the Y-type single mode fiber, the lasers pass through the first outgoing optical fiber collimating lens and the second outgoing optical fiber collimating lens after going out from the Y-type single mode fiber to form parallel lasers. The grating substrate clamping detection platform is used for generating reference light and recording interference fringes of to-be-detected light and the reference light, and is composed of a base, an angle scale, a locating groove, a fine-adjustment sliding block, a swinging arm, a pipe clamp, a beam expanding lens, a semi-permeable and semi-reflective lens, a CCD camera, a stand column, a one-dimensional adjustment clamp and an automatic-centering lens bracket.

Description

technical field [0001] The invention belongs to the field of spectrum technology, and in particular relates to an installation and adjustment device for the exposure light path of a holographic variable-pitch grating. Background technique [0002] The holographic variable pitch grating has curved lines with unequal spacing. By optimizing the groove function of the reticle, certain aberrations can be eliminated, thereby improving the imaging quality of the optical system. The application of holographic variable pitch grating can greatly improve the performance of spectroscopic instruments. [0003] The production principle of the holographic variable pitch grating is to use photoresist to record the interference fringes of two beams of coherent spherical waves or aspheric waves, and then convert them into relief contours after development. In the manufacturing process of the holographic variable-pitch grating, the parameters of the exposure light path determine the groove f...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of high measurement difficulty and low precision in the installation and adjustment process of the current holographic variable pitch grating exposure system, the present invention proposes a device capable of real-time measurement of exposure system parameters during the production process of the holographic variable pitch grating

Images