Semiconductor package structure
A packaging structure and semiconductor technology, which is applied in the direction of semiconductor devices, semiconductor/solid-state device components, electric solid-state devices, etc., can solve the problems that the reliability of the bump packaging structure needs to be improved, and achieve saving process steps, increasing contact area, The effect of enhancing adhesion
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[0022] After research, the bumps of the existing packaging structure are located on the surface of the metal layer under the bumps, and when subjected to external pressure or internal stress, the bumps are easy to fall off from the surface of the metal layer under the bumps or between the bumps and the bumps. The contact interface of the metal layer produces crack defects, which affects the reliability of the packaging structure.
[0023] The present invention provides a semiconductor packaging structure and a method for forming the same. The semiconductor packaging structure includes a polymer layer covering the semiconductor base and a part of the pad layer, and the polymer layer has a surface exposed to the pad layer. There are several discrete polymer pillars on the surface of the welding pad layer inside the opening; and a raised metal layer on the surface of the welding pad layer, polymer pillars and part of the polymer layer outside the opening. The presence of the poly...
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