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Expert system-based adaptive micro-focusing X-ray detection method

An expert system and detection method technology, applied in the field of adaptive micro-focus X-ray detection, can solve the problems of heavy workload and low efficiency, and achieve the effects of improving efficiency, realizing resolution, and avoiding manual adjustment

Inactive Publication Date: 2014-01-08
SOUTH CHINA UNIV OF TECH
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  • Claims
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Problems solved by technology

However, at present, a lot of research work is still at the stage of manually setting the size of the X-ray focus to suit different detection objects, which has a large workload and low efficiency.

Method used

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  • Expert system-based adaptive micro-focusing X-ray detection method
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  • Expert system-based adaptive micro-focusing X-ray detection method

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with specific examples.

[0029] Such as figure 1 As shown, the adaptive micro-focus X-ray detection method based on the expert system described in this embodiment adopts the following equipment: X-ray tube, PC upper computer, ARM lower computer, high frequency and high voltage generator, CCD camera, video capture card , power supply, wherein, described power supply is connected with high-frequency high-voltage generator, ARM lower-position computer, CCD camera respectively, X-ray tube is connected high-frequency high-voltage generator, is connected by Ethernet between PC upper computer and ARM lower-position computer, video acquisition The card is correspondingly installed in the PC upper computer and connected with the CCD camera.

[0030] Such as figure 2 As shown, the above-mentioned adaptive micro-focus X-ray detection method based on the expert system of the present embodiment, the specific ci...

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Abstract

The invention discloses an expert system-based adaptive micro-focusing X-ray detection method. The method comprises the following steps: firstly constructing a knowledge base based on an X-ray source focus and ray flux relationship, and a certain reasoning mechanism to establish a rational expert system of the field; then inputting parameters such as a current detection object material and accuracy requirement on an upper PC (Personal Computer); according to the parameters, reasoning a proper focus size parameter by the expert system and transmitting to an ARM (Advanced RISC Machine) lower computer through Ethernet; transmitting output power corresponding to a target focus to a high-frequency high-voltage generator by the ARM lower computer; regulating tube voltage and tube current by the high-frequency high-voltage generator to realize focus control so as to achieve the purpose of adaptive focus regulation, thereby adjusting the resolution of an imaging system and meeting the imaging requirements of various detection processes.

Description

technical field [0001] The invention relates to the field of non-destructive testing in the process of IC packaging, in particular to an expert system-based self-adaptive micro-focus X-ray testing method. Background technique [0002] As an emerging non-destructive testing technology, X-ray imaging testing technology is widely used in the field of industrial product testing. This inspection technology mainly uses images to judge whether a product is good or bad, and the image quality depends on the X-ray flux. The size of the focal point of the X-ray tube has a great influence on the X-ray flux. In addition, X-rays will be partially absorbed when penetrating a substance, and the degree of absorption is related to the composition, density and thickness of the substance. When an X-ray with energy E (eV) passes through a certain material, its photon intensity I (photon / cm 2 ) decays exponentially with distance through the material as follows: [0003] I=I 0 e -μd ...

Claims

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Application Information

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IPC IPC(8): H01L21/66
CPCH01L22/24H01L22/30
Inventor 高红霞万燕英胡跃明
Owner SOUTH CHINA UNIV OF TECH
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