Method of fabricating an inertial sensor
A technology of inertial sensor and manufacturing method, which is applied in the field of inertial sensor, can solve the problems of deformation affecting the performance of strain gauge, difficulty in controlling small thickness polysilicon layer, and influence of tension, etc., and achieve the effect of good sensitivity
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[0036] See attached Figure 15 According to an embodiment of the invention, a piezoresistive or resonant inertial sensor specifically includes a piezoresistive or resonant measuring beam 23 and an active body composed of a movable standard mass 13 and a deformable plate 14. The standard mass 13 is suspended in a closed cavity 30, 40, and the measuring beam 23 is connected with the deformable plate at the inner wall of the cavity. In particular, the thickness of the measuring beam 23 is smaller than that of the standard mass 13. Therefore, for the resonant measuring beam 23, the deflection of the standard mass 13 produces a change in the frequency of the resonator. For the piezoresistive strain gauge measuring arm 23, the deflection of the standard mass 13 causes a change in the resistance of the strain gauge, and the change can be restored by the electrical contact piece in the recess.
[0037] The method of manufacturing such a sensor will be based on the following Figure 1 to ...
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