Method of fabricating an inertial sensor

Abstract

Fabrication of an inertial sensor comprising at least one measurement beam (23) and an active body formed of a proof body (13) and of deformable blades (14), said active body being maintained in suspension inside a hermetic enclosure via its blades (14), the measurement beam (23) linking a part of the proof body (13) to an internal wall of said enclosure, said measurement beam (23) exhibiting a thickness less than that of the proof body (13).

Description

technical field

[0001] The invention relates to the field of inertial sensors, such as accelerometers or rate gyroscopes, formed in MEMS (“Micro Electro Mechanical Systems”) or NEMS (“Nano Electro Mechanical Systems”) technology.

[0002] In particular, the invention relates to a method for producing an inertial beam measuring sensor resonant or having a varistor, for example piezoresistive. Background technique

[0003] An inertial sensor, such as an accelerometer, is especially capable of measuring the acceleration of the object on which the accelerometer is mounted. Such sensors comprise in particular a proof mass (also called proof mass) joined to one or several measuring beams. As the sensor moves, the proof mass is subjected to inertial forces, causing tension in the beam.

[0004] For resonant measuring beams, the tension caused by the mass of the proof mass causes a change in the frequency of the resonator. For variable resistance measuring beams, such as piezores...

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