Piezoelectric electret material and preparation method thereof
A piezoelectric electret, electret technology, applied in the material selection of piezoelectric devices or electrostrictive devices, the manufacture/assembly of piezoelectric/electrostrictive devices, the selection of device materials, etc., can solve the problem of Limited charge storage, etc.
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[0046] see image 3 , the steps of the preparation method of the piezoelectric electret material 200 in the above-mentioned first embodiment include the following steps:
[0047] Step S210, providing a polymer layer 212 made of an electret material and an elastic deformation layer 216 made of an elastic material, wherein the elastic modulus of the elastic material is in the range of 0 MPa to 100 MPa.
[0048] The electret material can be selected from polytetrafluoroethylene (Polytetrafluoroethene, PTFE), fluorinated ethylene propylene copolymer (Fluorinated ethylene propylene, FEP), polypropylene (Polypropylene, PP), perfluoroalkoxy resin (Polyfluoroalkoxy, PFA) ), any one of polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF) or polyethylene naphthalate (PEN). The thickness of the polymer layer 212 may range from 0.1 μm to 2000 μm. For example, it may be 25 μm.
[0049] The elastic material of the elastic deformation layer 216 is selected from expanded pol...
Example Embodiment
[0076] Example 1
[0077] Preparation of piezoelectric electret with PET / ePTFE (porous polytetrafluoroethylene, a kind of polytetrafluoroethylene) structure
[0078] A composite membrane made of ePTFE material is provided. In this embodiment, ePTFE serves as both a polymer layer and an elastic deformation layer, and the outer surface of the composite membrane formed by the ePTFE material has a through-hole structure. The thickness of the film formed by ePTFE is 50 μm. An auxiliary layer formed of PET material is formed between the ePTFE and an electrode, so that the electrode can more easily fit on the surface of the ePTFE film. The ePTFE film was polarized by a grid-free corona polarization method with a polarization voltage of 30 kV, and the polarization time was 1 min. A first silver electrode and a second silver electrode with a thickness of 100 nm were respectively formed on the surfaces of the ePTFE film and the PET film by screen printing.
Example Embodiment
[0079] Example 2
[0080] Preparation of Piezoelectric Electret Materials with FEP / EPP Structure
[0081] A polymer layer with a thickness of 25 μm is provided from the FEP material, and an elastic deformation layer with a thickness of 50 μm is formed from the EPP material. The polymer layer formed of FEP material and the elastic deformation layer formed of EPP material are completed by means of bonding, using equipment and fixtures. Specifically, first stretch the EPP elastic deformation layer, then spray AB glue on the surface of the EPP elastic deformation layer, then cover the stretched FEP polymer layer on the surface of the AB glue layer, and then use the temperature of 100 ℃ to cure, The curing time is 60min. The FEP polymer layer was polarized by a grid-free corona polarization method with a polarization voltage of -30 kV, and the polarization time was 1 min. A first silver electrode and a second silver electrode with a thickness of 150 nm are respectively formed on...
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