A Thermal Field Structure of Polysilicon Ingot Furnace

Abstract

The invention discloses a thermal field structure of a polycrystalline silicon ingot furnace, which can avoid excessive melting of sub-crystals when a semi-melting process is performed. The thermal field structure of the polycrystalline silicon ingot furnace comprises a furnace body, wherein a lower support heat insulation plate and a heat insulation cover are arranged in the furnace body, the heat insulation cover and the lower support heat insulation plate jointly constitute a heat insulation cage, a crucible, a crucible protective plate, a graphite bottom plate, a graphite cover plate, a side heater, a top heater and a heat exchange platform are arranged in the heat insulation cage, a tail gas exhaust hole is formed in the upper end of the crucible protective plate, the thermal field structure further comprises a gas inlet pipe, the crucible protective plate comprises an upper protective plate and a lower protective plate, and the upper protective plate and the lower protective plate are spliced together. As the upper protective plate and the lower protective plate are spliced together, a splicing gap exists between the upper protective plate and the lower protective plate, the heat at the bottom of the crucible can be rapidly dissipated through the splicing gap, the excessive melting of the sub-crystals can be further avoided, and the sub-crystals can be kept in a semi-melted state. The thermal field structure is suitable for popularization and application in the field of polycrystalline silicon production equipment.

Description

technical field [0001] The invention relates to the field of polysilicon production equipment, in particular to a thermal field structure of a polysilicon ingot furnace. Background technique [0002] Solar cells can convert light energy into electrical energy, which is a key point in the development of a modern energy-saving society. According to different substrate materials, existing solar cells are divided into polycrystalline silicon solar cells, monocrystalline silicon solar cells and quasi-monocrystalline silicon solar cells. Among them, the conversion efficiency of monocrystalline silicon solar cells is high, but the production cost is also high. The conversion efficiency of polycrystalline silicon solar cells is 1%-2% lower than that of monocrystalline silicon solar cells, but its production cost is also low. The battery is a battery between a monocrystalline silicon battery and a polycrystalline silicon solar battery. Comprehensive consideration, the current solar...

AI Technical Summary

Problems solved by technology

[0014] In addition, when using the polysilicon ingot casting device for semi-melting processing, the thermal insulation cage does not need to be closed, and there is a gap between the thermal insulation cover and the lower support thermal insulation board to facilitate heat dissipation, but a layer of sub-crystals needs to be laid on the bottom of the crucible, and When heating and melting the silicon material, the seed crystals need to be kept in a semi-molten state, which requires strict and precise control of the heater to achieve this. It is extremely difficult to operate and it is easy to over-melt the seed crystals

Images