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Seed crystal protection device and single crystal growth method

A protection device and seed crystal technology, which is applied in the direction of single crystal growth, crystal growth, chemical instruments and methods, etc., can solve the problem of increasing the appearance of polycrystals, reducing the crystallization quality of single crystal crystals, and the instability of the contact interface between the melt and the seed crystal, etc. problem, to achieve the effect of ensuring full contact, ensuring the purity of single crystal, and realizing effective positioning

Active Publication Date: 2020-09-15
南通富电半导体材料科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] When using the above two single crystal horizontal growth methods, adding seed crystals can greatly improve the crystal nucleation rate and crystallization quality. The seed crystals are usually located at one end of the quartz boat, and are in contact with the melt of the raw materials during the heat preservation stage after the raw materials are heated and melted. , due to heat conduction, the seed crystal obtains a higher temperature and causes melting, which makes the contact interface between the melt and the seed crystal unstable, increases the probability of polycrystal appearance, and reduces the crystallization quality of single crystal crystal

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  • Seed crystal protection device and single crystal growth method
  • Seed crystal protection device and single crystal growth method
  • Seed crystal protection device and single crystal growth method

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Embodiment Construction

[0039]The present disclosure provides a seed crystal protection device and a single crystal growth method, which not only ensure the effective isolation of the seed crystal before use, so that the solid raw material or melt during the single crystal growth process does not contact the seed crystal during the heating and constant temperature stages, The heat conduction is greatly weakened, the excessive melting of the seed crystal is avoided, the single crystal formation rate is improved, and the temperature range of the quartz boat body area is wider, allowing the quartz boat body to be heated at a higher temperature and faster heating rate. The solid raw material or molten body in the machine is heated and operated at a constant temperature without affecting the seed crystal; it also realizes the effective positioning of the position where the seed crystal slides and stops, and ensures the full contact between the front cross section of the seed crystal and the molten body.

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Abstract

The invention discloses a seed crystal protecting device and a single crystal growing method. The seed crystal protecting device comprises a quartz boat which comprises a quartz boat body and a seed crystal introduction channel, wherein the quartz boat body is used for storing a crystal raw material; the seed crystal introduction channel comprises a channel arc-shaped part and a groove; the channel arc-shaped part is used for storing a seed crystal and / or used as a seed crystal sliding channel, and is higher than a horizontal line in which a fused crystal raw material is located; the groove isconnected with the channel arc-shaped part and located at the position of the outlet of the seed crystal introduction channel; a barrier is arranged at the front of the seed crystal placement position of the channel arc-shaped part to prevent the seed crystal from automatically sliding off; or the seed crystal introduction channel also comprises a horizontal section which is connected with the top part of the channel arc-shaped part; the seed crystal is placed in the interior of the horizontal section and is incapable of spontaneously sliding off; and when the sliding conditions of the seed crystal are triggered, the seed crystal can slide into the groove along the channel arc-shaped part. The device provided by the invention guarantees that the seed crystal is effectively isolated beforeapplication, so the formation rate of a single crystal is improved.

Description

technical field [0001] The disclosure belongs to the technical field of crystal growth, and relates to a seed crystal protection device and a single crystal growth method. Background technique [0002] The so-called single crystal means that the particles inside the crystal are regularly and periodically arranged in three-dimensional space, or the whole crystal is composed of the same spatial lattice in the three-dimensional direction, and the spatial arrangement of the particles in the whole crystal is Long-term orderly. Single crystals are continuous throughout their lattice and have important industrial applications. Single crystal growth preparation methods can be roughly divided into vapor phase growth, solution growth, hydrothermal growth, molten salt method, and melt method. The most common techniques are pulling method, crucible drop method, zone melting method, directional solidification method and so on. [0003] At present, the traditional single crystal growth...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B11/00C30B11/14
CPCC30B11/00C30B11/14
Inventor 白永彪赵有文沈桂英董志远刘京明谢晖余丁
Owner 南通富电半导体材料科技有限公司