Method and device for intensity compensation of differential pressure sensor

Abstract

The invention discloses a method for compensating for the intensity of a differential pressure sensor. The method is characterized in that two light sources are adopted to alternately emit light, two detection probes of the same structures are adopted to carry out detection, a Y-type coupler couples or separates light paths, then the ratios between pressure values of the two detection probes and a reference light path are calculated, and arithmetical operation is carried out on the ratios, so errors produced by fluctuation of the light sources are eliminated. The light bridge type layout mode is adopted in the light paths, the reference light paths of the two light sources pass through the Y-type coupler to reach the same photoelectric detector, reflection light receiving light paths of the two detection probes reach another photoelectric detector through the Y-type coupler, therefore, the integral light path structure of the sensor is simplified, layout of optical fibers of the light paths can be simple, meanwhile the number of the detectors is reduced, and a later data processing module is simplified. Finally, economical and reliability design is achieved.

Description

technical field [0001] The invention relates to a strength compensation method and device for a differential pressure sensor, belonging to the technical field of differential pressure sensors. Background technique [0002] Differential Pressure Sensor DPS (Differential Pressure Sensor) is a sensor used to measure the difference between two pressures, usually used to measure the pressure difference between the front and back ends of a device or component. In recent years, differential pressure sensors have been widely used in many high-precision measurement occasions such as micro-flow measurement, leak testing, clean room monitoring, environmental tightness testing, gas flow measurement, and liquid level measurement. [0003] At present, the research on differential pressure sensors at home and abroad mainly focuses on the traditional piezoresistive differential pressure sensors and capacitive differential pressure sensors. The piezoresistive differential pressure sensor ha...

AI Technical Summary

Problems solved by technology

[0008] In order to solve the problems of complex sensor structure, unreliable performance, high processing cost and large volume quality, it is proposed to adopt such a differential pressure sensing method and its sensor. The main point of this sensing method is that it is used to measure The detection fluid (such as hydraulic oil) that generates pressure from the measured object is used for sensing, so that the pressure generated by the detection fluid impacts one side of an elastic diaphragm to deform the elastic diaphragm; the other side of the elastic diaphragm is used The narrow-band laser in the incident fiber is irradiated, and the receiving fiber is used to receive the reflected light; in this way, when the elastic diaphragm is deformed, due to the change of the reflection angle, the reflected light changes accordingly, resulting in the output light intensity of the receiving fiber. In this way, the change in pressure caused by the detection fluid to the elastic diaphragm can be judged by detecting the change in the output light intensity of the receiving optical fiber

Images