Process liquid supply apparatus operating method, and process liquid supply apparatus
A technology of a supply device and an operation method, which is applied to a device for coating a liquid on a surface, a separation method, a chemical apparatus and a method, etc., can solve the problems of the complicated formation process of the filter part, etc., and achieve shortened startup time and treatment liquid consumption. reduced effect
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comparative test A－1）
[0113] To study the relationship between the amount of liquid passing through the filter and the bubbles with a size of 100 nm or more per 1 mL of the chemical solution when the filter wetting process is performed only by positive pressure filtration of the chemical solution using the same device as in the evaluation test A-1 sex.
comparative test A－2）
[0115] To examine the relationship between the amount of liquid passing through the filter and the bubbles of 100 nm or larger in size per 1 mL of the chemical solution when the filter wetting process is performed only by negative pressure filtration of the chemical solution using the same device as in the evaluation test A-1 sex.
[0116] Among them, N in each experiment 2 Air pressure, filtration rate and other conditions are as follows:
[0117] ・Used medicinal solution: OK73 diluent (registered trademark, manufactured by Tokyo Ohka Co., Ltd.)
[0118] ·N 2 Air pressure (for positive pressure filtration): 50kPa
[0119] Filtration rate during negative pressure filtration: 0.5mL / sec
[0120] ・Amount of liquid passing through the filter per time during positive pressure filtration in evaluation tests A-1 and A-2: 40mL
[0121] ・Amount of liquid passing through the filter per time during negative pressure filtration in evaluation tests A-1 and A-2: 60mL
[0122] Figure 1...
comparative test B－1）
[0132] In the study, the same procedure was carried out using the same device as in comparative test A-1. After the number of bubbles per 1 mL of the drug solution became 0.1, a test was performed four times in which negative pressure filtration was repeated 100 times for 6 seconds at 0.5 mL / sec. The distribution of the amount of air bubbles with a size of 100 nm or more per 1 mL of the drug solution.
[0133] Figure 13 Indicates the result. In comparative test B-1, the main distribution can be seen in the part where the amount of bubbles is about 2 per 1 mL, while in evaluation tests B-1 and B-2, the distribution is around about 0.5. Since the distribution was partially seen, it was seen that the amount of air bubbles was reduced compared with the comparative test. In addition, regarding the number of observed air bubbles, statistical examination results confirmed that there is a difference between the evaluation test and the comparative test, which is not accidental (p<0....
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