Free-standing diamond nano-film preparing device and method

Abstract

The invention discloses a free-standing diamond nano-film preparing device and method. The free-standing diamond nano-film preparing device comprises an electrode system, a divertor elbow and a deposition cavity, wherein the electrode system is connected with the inlet of the divertor elbow; the deposition cavity is connected with the outlet of the divertor elbow; the electrode system, the divertor elbow and the deposition cavity constitute a vacuum cavity; the divertor elbow comprises an elbow and a divertor coil which is wound the outside of the elbow; a substrate table is arranged in the deposition cavity; direct current bias is applied between the cavity of the deposition cavity and the substrate table; the bending angle of the divertor elbow is 90 degrees. The liquid fed in the deposition cavity has high ionization rate and less large particles. The direct current bias between the cavity of the deposition cavity and the substrate table can be regulated to regulate the energy of ions deposited on a substrate, so that the performance control of the film is convenient and fast. The pulse discharge frequency of arc voltage can be accurately controlled to conveniently control the deposition thickness, thereby creating conditions for preparing ultrathin film layers.

Description

technical field

[0001] The invention relates to the field of nanometer films, in particular to a self-supporting diamond-like nanometer film preparation device and a film preparation method. Background technique

[0002] Diamond-like DLC film is a metastable long-range disordered amorphous carbon material, the carbon atoms are bonded by covalent bonds, and mainly contain two hybridization modes of sp2 and sp3. Since the DLC film contains both sp3 hybridization in the diamond structure and sp2 hybridization in the graphite structure, it exhibits properties between diamond and graphite, hence the name diamond-like film. Diamond-like carbon film has high hardness, excellent anti-wear and anti-wear performance, high thermal conductivity, low dielectric constant, wide band gap, good optical transmittance, excellent chemical inertness and biocompatibility, etc., so It has broad application prospects in aerospace, machinery, electronics, optics, appearance decoration, biomedicine ...

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