Free-standing diamond nano-film preparing device and method

A nano-film, preparation device technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problem that thickness and quality affect the success of stripping and salvage, affect the production of supporting film, etc. The effect of high deposition rate, high ionization rate and high ionization rate

Active Publication Date: 2014-02-19
PEKING UNIV
View PDF2 Cites 12 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The thickness and quality of the film will further affect the success of the film removal and salvage during t...

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Free-standing diamond nano-film preparing device and method
  • Free-standing diamond nano-film preparing device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0041] The present invention will be further described through the embodiments below in conjunction with the accompanying drawings.

[0042] Such as figure 1 Shown: the self-supporting diamond-like nano-film preparation device of the present invention comprises: electrode system 1, diverter bend pipe 2 and deposition chamber 3; The deposition chamber 3 is connected, and the three constitute a vacuum chamber. Such as figure 2 As shown, the electrode system 1 includes a trigger electrode 13 and an arc coil 14 between the cathode 12 and the anode 11; the diverter bend 2 includes a bend 21 and a diverter coil 22 wound outside the bend, on the diverter coil 22 There is current, the inlet of the elbow 21 is connected to the cathode 12 of the motor system, and the outlet is connected to the deposition chamber 3; the bending angle of the diverter elbow 2 is 90 degrees; the deposition chamber 3 is provided with a substrate table 32, which has been plated The substrate with the rele...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a free-standing diamond nano-film preparing device and method. The free-standing diamond nano-film preparing device comprises an electrode system, a divertor elbow and a deposition cavity, wherein the electrode system is connected with the inlet of the divertor elbow; the deposition cavity is connected with the outlet of the divertor elbow; the electrode system, the divertor elbow and the deposition cavity constitute a vacuum cavity; the divertor elbow comprises an elbow and a divertor coil which is wound the outside of the elbow; a substrate table is arranged in the deposition cavity; direct current bias is applied between the cavity of the deposition cavity and the substrate table; the bending angle of the divertor elbow is 90 degrees. The liquid fed in the deposition cavity has high ionization rate and less large particles. The direct current bias between the cavity of the deposition cavity and the substrate table can be regulated to regulate the energy of ions deposited on a substrate, so that the performance control of the film is convenient and fast. The pulse discharge frequency of arc voltage can be accurately controlled to conveniently control the deposition thickness, thereby creating conditions for preparing ultrathin film layers.

Description

technical field [0001] The invention relates to the field of nanometer films, in particular to a self-supporting diamond-like nanometer film preparation device and a film preparation method. Background technique [0002] Diamond-like DLC film is a metastable long-range disordered amorphous carbon material, the carbon atoms are bonded by covalent bonds, and mainly contain two hybridization modes of sp2 and sp3. Since the DLC film contains both sp3 hybridization in the diamond structure and sp2 hybridization in the graphite structure, it exhibits properties between diamond and graphite, hence the name diamond-like film. Diamond-like carbon film has high hardness, excellent anti-wear and anti-wear performance, high thermal conductivity, low dielectric constant, wide band gap, good optical transmittance, excellent chemical inertness and biocompatibility, etc., so It has broad application prospects in aerospace, machinery, electronics, optics, appearance decoration, biomedicine ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): C23C14/06C23C14/46
Inventor 颜学庆符合振朱军高
Owner PEKING UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap