Device for measuring gas concentration based on short cavity enhanced correlation spectroscopy, and method for measuring gas concentration by adopting device

A technology of gas concentration and correlation spectrum, which is applied in the field of laser absorption spectroscopy, can solve the problems of poor stability, high cost, and large volume, and achieve the effects of high stability, low cost, and small volume

Active Publication Date: 2014-04-02
哈尔滨工业大学高新技术开发总公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention aims to solve the problems of poor stability, high cost and large volume in the existing cavity-enhanced TDLAS technology, and now provide

Method used

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  • Device for measuring gas concentration based on short cavity enhanced correlation spectroscopy, and method for measuring gas concentration by adopting device
  • Device for measuring gas concentration based on short cavity enhanced correlation spectroscopy, and method for measuring gas concentration by adopting device
  • Device for measuring gas concentration based on short cavity enhanced correlation spectroscopy, and method for measuring gas concentration by adopting device

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specific Embodiment approach 1

[0037]Specific implementation mode one: refer to figure 1 Describe this embodiment in detail. The device for measuring gas concentration based on short-cavity enhanced correlation spectroscopy described in this embodiment includes a multimode laser 1, a beam splitter 2, an optical isolator 3, a first mirror 4, a second No. 5 reflector, No. 3 reflector 6, front aperture 7, rear aperture 8, highly reflective cavity sample cell 9, sample optical path detector 10, reference optical path detector 11, reference optical path reference cell 12, data acquisition processor 13 and signal modulator 14;

[0038] The signal modulator 14 transmits a temperature modulation signal to the temperature receiving end of the multimode laser 1, and at the same time the signal modulator 14 transmits a current modulation signal to the current receiving end of the multimode laser 1, and the multimode laser 1 emits a beam to the beam splitter 2, and the beam splitter 2 Divide the light beam into two be...

specific Embodiment approach 2

[0040] Specific embodiment two: this embodiment is a further description of the device for measuring gas concentration based on short-cavity enhanced correlation spectroscopy described in specific embodiment one. In this embodiment, the two ends of the high reflection cavity sample pool 9 are respectively set There is a high reflection mirror, and the distance between the two high reflection mirrors is adjustable between 0cm and 10cm; the reflectivity of the two high reflection mirrors is between 0.99 and 1, and the reflectivity of the two high reflection mirrors Similarly, the radius of curvature of the two high-reflection mirrors ranges from 10cm to 50cm, and the radius of curvature of the two high-reflection mirrors is the same.

[0041] Since the two ends of the high reflection cavity sample cell 9 are respectively provided with a high reflection mirror, and the distance between the two high reflection mirrors is adjustable between 0 cm ~ 10 cm, the cavity length of the hig...

specific Embodiment approach 3

[0042] Specific Embodiment 3: This embodiment is a further description of the device for measuring gas concentration based on short-cavity enhanced correlation spectroscopy described in Specific Embodiment 1. In this embodiment, the diameter of the front diaphragm 7 is less than 3mm, and the diameter of the rear The diameter of the diaphragm 8 is less than 3 mm, and the diameter of the front diaphragm 7 is equal to the diameter of the rear diaphragm 8 .

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Abstract

The invention discloses a device for measuring gas concentration based on a short cavity enhanced correlation spectroscopy, and a method for measuring the gas concentration by adopting the device, and relates to the field of laser absorption spectra, in particular to a high-sensitivity measuring device and a method for the gas concentration. The device and the method aim at solving the problems that the existing cavity enhanced TDLAS (Tunable Diode Laser Absorption Spectroscopy) is poor in stability, high in cost and large in size. Laser modulated by a signal modulator and sent by a multimode laser device is divided into two beams by a beam splitter; one beam passes through a reference gas cell and then is received by a reference detector; the other beam passes through an optical isolator, a pre-diaphragm, a post-diaphragm and a high reflection cavity sample cell provided with high reflectors at the two ends, and then is received by a sample detector; two detector signals are input into a data acquisition processor for analyzing and processing; and finally the concentration of to-be-measured gas is obtained. The device and the method are suitable for measuring the trace gas concentration.

Description

technical field [0001] The invention relates to the field of laser absorption spectroscopy, in particular to a device and method for highly sensitive measurement of gas concentration. Background technique [0002] In the current method of spectroscopic measurement of gas concentration, absorption spectroscopy is the mainstream, because it has a non-absorbing background signal that can be used as a reference, so compared with other techniques such as fluorescence spectroscopy and photoacoustic spectroscopy, it is more important in practical applications. better quantitative detection. In the field of trace gas detection, the most commonly used absorption spectroscopy techniques include differential optical absorption spectroscopy DOAS in the ultraviolet-visible band, differential absorption lidar DIAL, Fourier transform spectroscopy FTIR and tunable semiconductor laser absorption spectroscopy TDLAS, etc. Compared with other absorption spectroscopy technologies, TDLAS technol...

Claims

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Application Information

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IPC IPC(8): G01N21/39
Inventor 娄秀涛董永康武东城哈斯乌力吉吕志伟
Owner 哈尔滨工业大学高新技术开发总公司
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