Manufacture method of high-definition digital X-ray flat panel detector

Abstract

The invention discloses a manufacture method of a high-definition digital X-ray flat panel detector. The concrete procedures comprise washing a substrate by using an ultrasonic method, and drying and storing the substrate; enabling a thin film transistor array to grow on the substrate; employing an amorphous selenium semi-conductor material to generate a thin film on the thin film transistor array in a vacuum vapor plating mode; laying an electronic sealed layer onto the amorphous selenium semi-conductor material; mounting an X-ray semiconductor onto the electronic sealed layer; laying an insulating layer onto the X-ray semiconductor; and mounting a motor layer onto the insulating layer. In this way, the manufacture method of the high-definition digital X-ray flat panel detector enables the thin film and the substrate to have a sufficient binding force. Thus, the image definition is higher.

Description

technical field [0001] The invention relates to a method for manufacturing a flat panel detector, in particular to a method for manufacturing a high-definition digital X-ray flat panel detector. Background technique [0002] X-ray detectors are widely used in industrial and medical industries, and are becoming more and more important as the scintillator part of X-ray detectors. For some new medical scintillators, it is very difficult to prepare single crystals. The development of polycrystalline ceramic scintillators is currently the most important research direction. Polycrystalline ceramic scintillators have the advantages of low cost, good processing performance, and easy performance tailoring. Currently the first choice for medical scintillators. [0003] Among the new detectors for X-ray diagnosis, planar detectors using active matrix are being developed. In this planar detector, the scintillation layer is used to convert the detected X-rays into visible light or fluo...

AI Technical Summary

Problems solved by technology

In this planar detector, the scintillation layer is used to convert the detected X-rays into visible light or fluorescent light, and then the fluorescent light is converted into signal charges through photoelectric conversion elements such as amorphous silicon photodiodes, and then the signal charges are converted into digital However, the bonding force between the film and the substrate is often not enough, and the definition of the image is poor