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A polysilicon ingot casting process

A technology for polysilicon and ingot casting is applied in the field of polysilicon ingot casting technology, which can solve the problems affecting the quality and yield of ingot products, inability to accurately control the crystal growth process, and affecting yield, etc., so as to prevent the quality of polysilicon ingots from declining and improve The effect of crystal growth quality and easy operation

Inactive Publication Date: 2015-12-30
XIAN HUAJING ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When actually casting polysilicon ingots, the control of the crystal growth process directly affects the quality and yield of the finished ingot. If the crystal growth is stable, a higher minority carrier lifetime and better yield can be obtained; if the crystal growth process is not well controlled, May cause defects such as sticky pot, crystal cracks, hard spots, microcrystals, etc., directly affecting the yield
Nowadays, when casting polysilicon ingots, most manufacturers cannot accurately control the crystal growth process, resulting in defects such as sticky pots, crystal cracks, hard spots, and microcrystals.

Method used

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  • A polysilicon ingot casting process
  • A polysilicon ingot casting process

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] Such as figure 1 A kind of polysilicon ingot casting process shown, comprises the following steps:

[0055] Step 1. Preheating: Preheat the silicon material loaded in the crucible with an ingot casting furnace, and gradually raise the heating temperature of the ingot casting furnace to T1; the preheating time is 7 hours, where T1=1175°C.

[0056] In this embodiment, the ingot casting furnace is a G5 type ingot casting furnace. Moreover, the ingot casting furnace is specifically a G5 type ingot casting furnace produced by Zhejiang Jingsheng Electromechanical Co., Ltd. The crucible is a quartz crucible and it is a G5 crucible, and the produced polysilicon ingot is a G5 ingot.

[0057] In actual use, the charging capacity of the quartz crucible is about 600kg.

[0058] In this embodiment, the charging capacity of the quartz crucible is 560kg. During actual use, the charging amount of the quartz crucible can be adjusted accordingly according to specific needs.

[0059]...

Embodiment 2

[0118] In this example, the difference from Example 1 is: the preheating time in step 1 is 6h and T1=1185°C, P1=80kW; in step 2, T5=1560°C, t=18min, Q1=650mbar; step 1 The middle holding time is 0.4h; from the second step to the fifth step, T2=1210°C, and the heating time is 0.4h; in the sixth step, T3=1460°C, and the heating time is 3.5h; in the seventh step, T4=1510°C and The heating time is 3.5h; in the 8th step T5=1560℃ and the heating time is 3.5h; the holding time in the 9th step is 3.5h; the holding time in the 10th step is 4h.

[0119] In the present embodiment, when heating up and pressurizing in the 2nd step to the 5th step, the process is as follows:

[0120] The second step, the first step of raising: raising the heating temperature of the ingot casting furnace from 1185° C. to 1190° C., and the heating time is 5 minutes.

[0121] The third step, the second step of raising: raising the heating temperature of the ingot casting furnace from 1190° C. to 1195° C., and...

Embodiment 3

[0130] In this example, the difference from Example 1 is: the preheating time in step 1 is 10h and T1=1165°C, P1=70kW; in step 2, T5=1540°C, t=22min, Q1=550mbar; step 1 The medium holding time is 0.6h; from the second step to the fifth step, T2=1190°C, and the heating time is 0.6h; in the sixth step, T3=1440°C, and the heating time is 4.5h; in the seventh step, T4=1490°C and The heating time is 4.5h; in the 8th step T5=1540℃ and the heating time is 4.5h; the holding time in the 9th step is 4.5h; the holding time in the 10th step is 8h.

[0131] In the present embodiment, when heating up and pressurizing in the 2nd step to the 5th step, the process is as follows:

[0132] The second step, the first step of raising: raising the heating temperature of the ingot casting furnace from 1165° C. to 1172° C., and the heating time is 9 minutes.

[0133] The third step, the second step of raising: raising the heating temperature of the ingot casting furnace from 1172° C. to 1178° C., an...

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Abstract

The invention discloses a polycrystalline silicon ingot casting process. The process comprises the following steps: 1, preheating; 2, melting; 3, growing crystal: the temperature is controlled to T6 and is preserved for 1h, and T6=1420 DEG C; the hoisting height of a heat insulation cage is 90mm; the temperature is controlled to T6 and is preserved for 2h, and the hoisting height of the heat insulation cage is not changed; the temperature is controlled to T6 and is preserved for 3h, and the hoisting height of the heat insulation cage is 110mm; the temperature is gradually lowered from T6 to T7, the temperature lowering time is 7-9h, and the hoisting height of the heat insulation cage is 210mm; T7=1405 DEG C; the temperature is controlled to T7 and is preserved for 7-9h, and the hoisting height of the heat insulation cage is not changed; the temperature is controlled to T7 and is preserved for 7-9h, and the hoisting height of the heat insulation cage is not changed; the temperature is gradually lowered from T7 to T8, and the hoisting height of the heat insulation cage is not changed; T8=1395 DEG C; 4, annealing and cooling. The polycrystalline silicon ingot casting process has the advantages of simple steps, reasonable design, convenience in realization, easiness in grasp and good using effect and can reasonably control the ingot casting crystal growth process.

Description

technical field [0001] The invention belongs to the technical field of polysilicon ingot casting, and in particular relates to a polysilicon ingot casting process. Background technique [0002] Photovoltaic power generation is one of the most important clean energy sources with great development potential. The key factors restricting the development of photovoltaic industry are low photoelectric conversion efficiency on the one hand and high cost on the other hand. Photovoltaic silicon wafers are the basic material for the production of solar cells and components. The purity of polysilicon used for the production of photovoltaic silicon wafers must be above 6N (that is, the total content of non-silicon impurities is below 1ppm), otherwise the performance of photovoltaic cells will be greatly negative influences. In recent years, the production technology of polycrystalline silicon wafers has made remarkable progress, and the polycrystalline ingot casting technology has pro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B28/06C30B29/06
Inventor 周建华
Owner XIAN HUAJING ELECTRONICS TECH