A polysilicon ingot casting process
A technology for polysilicon and ingot casting is applied in the field of polysilicon ingot casting technology, which can solve the problems affecting the quality and yield of ingot products, inability to accurately control the crystal growth process, and affecting yield, etc., so as to prevent the quality of polysilicon ingots from declining and improve The effect of crystal growth quality and easy operation
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Embodiment 1
[0054] Such as figure 1 A kind of polysilicon ingot casting process shown, comprises the following steps:
[0055] Step 1. Preheating: Preheat the silicon material loaded in the crucible with an ingot casting furnace, and gradually raise the heating temperature of the ingot casting furnace to T1; the preheating time is 7 hours, where T1=1175°C.
[0056] In this embodiment, the ingot casting furnace is a G5 type ingot casting furnace. Moreover, the ingot casting furnace is specifically a G5 type ingot casting furnace produced by Zhejiang Jingsheng Electromechanical Co., Ltd. The crucible is a quartz crucible and it is a G5 crucible, and the produced polysilicon ingot is a G5 ingot.
[0057] In actual use, the charging capacity of the quartz crucible is about 600kg.
[0058] In this embodiment, the charging capacity of the quartz crucible is 560kg. During actual use, the charging amount of the quartz crucible can be adjusted accordingly according to specific needs.
[0059]...
Embodiment 2
[0118] In this example, the difference from Example 1 is: the preheating time in step 1 is 6h and T1=1185°C, P1=80kW; in step 2, T5=1560°C, t=18min, Q1=650mbar; step 1 The middle holding time is 0.4h; from the second step to the fifth step, T2=1210°C, and the heating time is 0.4h; in the sixth step, T3=1460°C, and the heating time is 3.5h; in the seventh step, T4=1510°C and The heating time is 3.5h; in the 8th step T5=1560℃ and the heating time is 3.5h; the holding time in the 9th step is 3.5h; the holding time in the 10th step is 4h.
[0119] In the present embodiment, when heating up and pressurizing in the 2nd step to the 5th step, the process is as follows:
[0120] The second step, the first step of raising: raising the heating temperature of the ingot casting furnace from 1185° C. to 1190° C., and the heating time is 5 minutes.
[0121] The third step, the second step of raising: raising the heating temperature of the ingot casting furnace from 1190° C. to 1195° C., and...
Embodiment 3
[0130] In this example, the difference from Example 1 is: the preheating time in step 1 is 10h and T1=1165°C, P1=70kW; in step 2, T5=1540°C, t=22min, Q1=550mbar; step 1 The medium holding time is 0.6h; from the second step to the fifth step, T2=1190°C, and the heating time is 0.6h; in the sixth step, T3=1440°C, and the heating time is 4.5h; in the seventh step, T4=1490°C and The heating time is 4.5h; in the 8th step T5=1540℃ and the heating time is 4.5h; the holding time in the 9th step is 4.5h; the holding time in the 10th step is 8h.
[0131] In the present embodiment, when heating up and pressurizing in the 2nd step to the 5th step, the process is as follows:
[0132] The second step, the first step of raising: raising the heating temperature of the ingot casting furnace from 1165° C. to 1172° C., and the heating time is 9 minutes.
[0133] The third step, the second step of raising: raising the heating temperature of the ingot casting furnace from 1172° C. to 1178° C., an...
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