Compensation system, high-order aspheric surface detection device and method

A technology of high-order aspheric surface and compensation system, applied in the field of optical aspheric surface detection, can solve the problem of low accuracy, achieve the effects of reliable and effective detection accuracy, reduced processing and assembly accuracy requirements, and increased cost

Inactive Publication Date: 2017-01-04
SUZHOU UNIV +1
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Problems solved by technology

The compensation system can solve the problem of low accuracy of the existing multi-lens compensation system, improve the detection accuracy of the high-order aspheric surface to a level within λ / 5 (λ=633nm), and greatly improve the production quality of the high-order aspheric mirror

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  • Compensation system, high-order aspheric surface detection device and method
  • Compensation system, high-order aspheric surface detection device and method
  • Compensation system, high-order aspheric surface detection device and method

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Embodiment Construction

[0030] As mentioned in the background art, in the manufacturing process of the high-order aspheric mirror, the detection of the high-order aspheric surface is quite a key technology. Most of the existing high-order aspheric detection technologies use the interference detection method. In this method, in order to improve the compensation ability for high-order aspheric surfaces with large deviation and large relative aperture, it is often necessary to use multiple aspheric optical lenses to form a compensation system. However, there will be errors in the dimensions of each optical lens when it is manufactured, and there are assembly alignment errors between the lenses. Therefore, with the increase in the number of optical lenses, the error of the compensation system itself is continuously enlarged. Taking 6 aspheric lenses as an example, even if each lens is prepared with extremely strict requirements, after these lenses are assembled together, it can cause The error can still...

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Abstract

The invention discloses a compensation system and a device and a method for detecting a high-order aspheric surface. The compensation system comprises a plurality of coaxial optics lenses. A spectroscope is arranged in the coaxial optics lenses; one surface of the spectroscope is a secondary aspheric surface; the secondary aspheric surface is located in the middle position of the compensation system; a light ray arrives at the secondary aspheric surface in a vertical incidence manner; part of the light ray returns according to an original light part through reflection to form standard light, and the other part of the light ray transmits vertically from the secondary aspheric surface to form measurement light. As the measurement light and the standard light are common in light part in an optical system in front of the spectroscope, so that adverse effects caused by surface-shape errors, system assembly errors, eccentric errors, the material refractive index homogeneity and the clamping stress of the components are canceled; the requirement on processing assembly precision is greatly lowered, and therefore, error space can be helped to be kept for various assembly deviations; higher detection precision can be achieved, and the final detection precision is reliable and effective.

Description

technical field [0001] The invention relates to the field of optical aspheric surface detection, in particular to a high-precision high-order aspheric surface detection compensation system and detection method. Background technique [0002] Aspheric surface can endow a single surface with more characteristics in optical design, which can realize the advantages of system simplification and improvement of imaging quality, but the equation form is more complicated and there are many parameters: [0003] y = cx 2 1 + 1 - c 2 k 2 x 2 + A 1 x 2 + A 2 x 4 + A 3 ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/00G02B27/10
Inventor 解滨张聪跃于玲玲唐烨肖志宏
Owner SUZHOU UNIV
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