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Double-workpiece table macro and micro fast connecting mechanism

A dual workpiece table and workpiece table technology, which is applied in electrical components, microlithography exposure equipment, semiconductor/solid-state device manufacturing, etc. Compact, mass-reducing effect

Active Publication Date: 2014-04-30
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The contact part between the pressure plate and the workbench of the above device is a plane, and the flatness of the two directly affects the clamping performance, and the above device does not consider the safety protection when the clamping force fails

Method used

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  • Double-workpiece table macro and micro fast connecting mechanism
  • Double-workpiece table macro and micro fast connecting mechanism
  • Double-workpiece table macro and micro fast connecting mechanism

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0018] The implementation of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0019] A double-workpiece macro-micro fast handover mechanism, the upper splint 1, the second leaf spring 19, the lever fulcrum 17 and the cylinder body 7 are respectively fixed on the base body, and the movable chuck 4 and the lower splint 2 can be moved from top to bottom in sequence. The one that moves up and down is arranged under the upper splint 1. The arc-shaped pit on the upper splint 1 is inserted into the arc-shaped protrusion on the movable chuck 4. The first leaf spring 5 with a flexible hinge structure will The workpiece table 6 is connected with the movable chuck 4, and the two ends of the adjustable pressure spring 41 are in contact with the workpiece table 6 and the first leaf spring 5 respectively. 31 is an insertion fit with the rectangular groove 32 on the workpiece table 6; a disc spring 9 and a piston 8 are installed in the ...

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PUM

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Abstract

The invention discloses a double-workpiece table macro and micro fast connecting mechanism and belongs to clamping and catching machines. The double-workpiece table macro and micro fast connecting mechanism is used for carrying out butt joint and separation of a workpiece table macro moving mechanism and a micro moving table of a photoetching machine. An upper clamping plate, a second leaf spring, a lever fulcrum and an air cylinder body are fixedly arranged on a base body, and a moving clamping head and a lower clamping plate are arranged below the upper clamping plate. A first leaf spring is used for connecting the workpiece table and the moving clamping head. The two ends of a pressure-adjustable spring are matched with the workpiece table and the first leaf spring respectively in a contact mode. A rectangular baffle is assembled on the upper clamping plate, and a disc spring, a piston and a piston rod are assembled in the air cylinder body. A gas conveying pipeline is used for communicating the air cylinder body and a normally-closed two-position three-way electromagnetic valve. The lower clamping plate is fixedly provided with a connection rod, a lever short arm is assembled on the lever fulcrum, an arc groove plate is installed at one end of the lever short arm, and the outer end of the piston rod on the air cylinder body is connected with one end of a lever long arm through a bearing. The other end of the lever long arm is connected with the other end of the lever short arm through a telescoping mechanism. The double-workpiece table macro and micro fast connecting mechanism has the advantages of being large in clamping force and fast in clamping.

Description

technical field [0001] The invention belongs to a clamping and grabbing machine, and mainly relates to a macro-micro rapid handover mechanism of a double workpiece table in the technical field of semiconductor manufacturing equipment. Background technique [0002] Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. As the key subsystem of the lithography machine, the workpiece stage determines the resolution, overlay accuracy and productivity of the lithography machine to a large extent. Productivity is one of the main goals of lithography machine development. Under the condition of satisfying the resolution and overlay accuracy, improving the operating efficiency of the workpiece table and increasing the productivity of the lithography machine is the development direction of the workpiece table technology. The most direct way is to increase the motion acceleration and speed of the workpiece table...

Claims

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Application Information

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IPC IPC(8): H01L21/687G03F7/20
CPCG03F7/20H01L21/6838H01L21/687
Inventor 吴剑威谭久彬袁勇
Owner HARBIN INST OF TECH
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