A production device for high-purity electronic-grade phosphoric acid

An electronic-grade phosphoric acid and production device technology, applied in phosphorus compounds, inorganic chemistry, non-metallic elements, etc., can solve the problems of cumbersome production process, large floor space, low product yield, etc., to improve heat exchange rate, equipment Small footprint and high product yield
CN103771376BActive Publication Date: 2016-01-27GUANGXI MINGLI CHEM
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
GUANGXI MINGLI CHEM
Publication Date
2016-01-27

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Abstract

The invention discloses a device for producing high-purity electronic-scale phosphoric acid. The device comprises an agitating crystallizer, a vacuum pump, an acid discharge pump, an acid adjusting tank and a circulating pump, wherein the agitating crystallizer, the acid discharge pump, the acid adjusting tank and the circulating pump are orderly connected in cycle through a pipeline; the vacuum pump is connected with the lower part of the agitating crystallizer through a pipeline; valves are arranged on all pipelines. The heat exchange rate of phosphoric acid and a medium is improved by adopting agitating crystallization and crystal-melting modes, the crystallization and crystal-melting speeds are improved, vacuum suction filtration is carried out by the vacuum pump, and separation of crystal and liquid phases is more thorough and rapider. Thus, the production cycle of electronic-scale phosphoric acid is greatly shortened, and the production efficiency is greatly improved. Thus, the device is simple in structure, small in floor area, convenient to use, safe and reliable, resources can be utilized in cycle, the production cost is reduced, the industrial production can be achieved, and the product is high in yield, and has good economic efficiency.
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Description

technical field

[0001] The invention belongs to the technical field of chemical equipment, and in particular relates to a production device of high-purity electronic-grade phosphoric acid. Background technique

[0002] Electronic-grade phosphoric acid belongs to high-purity phosphoric acid, which is widely used in microelectronics industries such as large-scale integrated circuits and thin-film liquid crystal displays (TFT-LCD). It is mainly used for cleaning and etching chips. , Conductivity and reliability have a great influence. The ones with lower purity are mainly used for cleaning liquid crystal panel components, and the ones with higher purity are mainly used for cleaning and etching in the production process of electronic chips. Since insoluble solid particles or metal ions may be in the The current is conducted between the tiny circuits to make it short circuit, so electronic grade phosphoric acid has strict requirements on the content of insoluble solid particles a...

Claims

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