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A kind of alticrn/yn nanometer multi-layer hard coating and preparation method thereof

A hard coating, nano-multi-layer technology, applied in coatings, chemical instruments and methods, metal material coating technology, etc., can solve the problem that the high-temperature performance advantages of TiAlCrYN coatings have not been fully utilized, and the effect of enhanced bonding is not obvious , Unfavorable oxidation resistance and other issues, to achieve the effect of excellent high temperature oxidation resistance, easy implementation, high hardness

Inactive Publication Date: 2015-10-28
SICHUAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

After testing, the fracture structure of the obtained TiAlCrYN coating shows an obvious columnar crystal structure, and there are a large number of microscopic gaps in the coating, which is extremely unfavorable for oxidation resistance; at the same time, due to the low Al content, which only accounts for 21 at.%, the TiAlCrYN coating is at 850 Oxidative decomposition begins in the range of ~900°C, and the high-temperature performance advantages of TiAlCrYN coatings have not been fully utilized
In addition, in this technology, in order to improve the bonding force between the coating and the substrate, a layer of Ti bonding layer is sputter-deposited before preparing TiAlCrYN, but due to the low energy of deposited atoms or ions in the sputter coating process, the enhanced The combined effect is not obvious

Method used

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  • A kind of alticrn/yn nanometer multi-layer hard coating and preparation method thereof
  • A kind of alticrn/yn nanometer multi-layer hard coating and preparation method thereof
  • A kind of alticrn/yn nanometer multi-layer hard coating and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0033] Clean the hard alloy turning tool with the conventional method, put it into the coating chamber after drying, and evacuate to 6.0×10 －3 Pa, and then argon gas is introduced into the coating chamber, and the pressure is controlled at 3.5×10 －1 Pa, turn on the hot cathode ion column arc so that the current is 160A, use the electrons generated by it to bombard the tool substrate for heating, and the time is 80min; adjust the flow of argon to make the pressure 1.5×10 －1 Pa, under the condition of applying -100V DC bias voltage and -350V pulse bias voltage to the tool at the same time, etch and clean for 15min; adjust the pressure to 1.1×10 －1 Pa, and the current of the hot cathode ion column arc is adjusted to 200A, so that the pure Ti metal in the crucible is melted and evaporated, and the tool substrate is plated for 10 minutes to deposit a layer of Ti bonding layer on the surface; 3.8×10 －1 Pa, the nitrogen-argon partial pressure ratio is 0.45, and the current of the h...

Embodiment 2

[0036] Clean the cemented carbide milling cutter with the conventional method, put it into the coating chamber after drying, and evacuate to 6.0×10 －3 Pa, and then argon gas is introduced into the coating chamber, and the pressure is controlled at 3.6×10 －1 Pa, turn on the hot cathode ion column arc so that the current is 140A, use the electrons generated by it to bombard the tool substrate for heating, and the time is 70min; adjust the flow of argon to make the pressure 2.1×10 －1 Pa, under the condition of applying -100V DC bias and -200V pulse bias to the tool at the same time, etch and clean for 18min; adjust the pressure to 1.0×10 －1 Pa, and the current of the hot cathode ion column arc is adjusted to 180A, so that the pure Cr metal in the crucible is melted and evaporated, and the tool substrate is plated for 8 minutes to deposit a layer of Cr bonding layer on the surface; 3.0×10 －1 Pa, the nitrogen-argon partial pressure ratio is 0.25, and the current of the hot cathod...

Embodiment 3

[0039] Clean the high-speed steel taps by conventional methods, put them into the coating chamber after drying, and vacuumize to 6.0×10 －3 Pa, and then argon gas is introduced into the coating chamber, and the pressure is controlled at 4.0×10 －1 Pa, turn on the hot cathode ion column arc so that the current is 165A, use the electrons generated by it to bombard the tool substrate for heating, and the time is 50min; adjust the flow of argon to make the pressure 2.0×10 －1 Pa, under the condition of applying -180V DC bias voltage and -300V pulse bias voltage to the tool at the same time, etch and clean for 60min; adjust the pressure to 1.2×10 －1 Pa, and the current of the hot cathode ion column arc is adjusted to 202A, so that the pure Ti metal in the crucible is melted and evaporated, and the tool substrate is plated for 10 minutes to deposit a layer of Ti bonding layer on the surface; 4.0×10 －1 Pa, the nitrogen-argon partial pressure ratio is 0.4, and the current of the hot ca...

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Abstract

The invention discloses a preparation method of an AlTiCrN / YN nano multilayer hard coating. The preparation method comprises the following steps: cleaning, heating, etching and cleaning, preparing a Ti or Cr adhesion layer and preparing an AlTiCrN / YN wear-resistant layer. According to the preparation method provided by the invention, a Ti or Cr bonding layer is deposited on a tool matrix by adopting an evaporation coating method, and AlTiCrN layers and YN layers are alternatively periodically deposited on the Ti or Cr bonding layer by adopting an intermediate frequency reaction magnetron sputtering technology, thus the prepared AlTiCrN / YN nano multilayer hard coating tissue is of a non-columnar crystal structure, is compact, and is small in grain, is firmly bound with a tool matrix; the coating has higher hardness and excellent high-temperature oxidization resistance performance, and is especially suitable for making a high-speed dry type cutting stainless steel, an iron-based high-temperature alloy, a high-strength structural steel and a wear-resistant cast steel tool. The AlTiCrN / YN nano multilayer hard coating is simple in coating process, easy to implement and more suitable for industrialized production.

Description

technical field [0001] The invention belongs to the technical field of tool surface coating and its preparation, and in particular relates to an AlTiCrN / YN nanometer multilayer hard coating and a preparation method thereof. Background technique [0002] With the development of modern processing technology, the requirements for the performance and quality of cutting tools have also increased accordingly. Coating the tool surface is one of the effective methods to improve the surface hardness and oxidation resistance of the tool. At the same time, according to the different coating materials on the surface of the tool, different performance requirements and processing purposes can be achieved. [0003] TiN coating is the earliest and widely used coating material on cutting tools, but when the coating is used in the air at a temperature of 500-600 °C, the TiN coating will be partially oxidized to form loose TiO 2 , thus losing the function of protecting the tool, so TiN coati...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/35C23C14/02B32B9/00B32B15/04
Inventor 赵海波鲜广梁红樱梁雅庭杜昊
Owner SICHUAN UNIV
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