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Cerium-terbium co-doped calcium sulfate luminous film and preparation method and application thereof

A light-emitting thin film and double doping technology, which is applied in the direction of light-emitting materials, chemical instruments and methods, semiconductor devices, etc.

Inactive Publication Date: 2014-05-21
OCEANS KING LIGHTING SCI&TECH CO LTD +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, cerium and terbium double-doped calcium sulfate luminescent films that can be applied to thin film electroluminescent displays have not been reported yet.

Method used

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  • Cerium-terbium co-doped calcium sulfate luminous film and preparation method and application thereof
  • Cerium-terbium co-doped calcium sulfate luminous film and preparation method and application thereof
  • Cerium-terbium co-doped calcium sulfate luminous film and preparation method and application thereof

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preparation example Construction

[0032] The preparation method of the above-mentioned cerium-terbium double-doped calcium sulfate luminescent film comprises the following steps:

[0033] Step S11, according to Ca 1-x-y SO 4 :xCe 3+ , yTb 3+ The stoichiometric ratio of each element will be CaSO 4 , CeO 2 and Tb 4 o 7 The powder, after mixing, is sintered at 900°C to 1300°C to obtain the target;

[0034] Load the substrate into the reaction chamber of the chemical vapor deposition equipment, and set the vacuum degree of the reaction chamber to 1.0×10 -3 Pa~1.0×10 -5 Pa.

[0035] In this embodiment, the substrate is indium tin oxide glass (ITO). It can be understood that in other embodiments, it can also be fluorine-doped tin oxide glass (FTO), aluminum-doped zinc oxide (AZO) or indium-doped glass. zinc oxide (IZO); the substrate was ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber.

[00...

Embodiment 1

[0058] 0.94mmol CaSO 4 , 0.02 mmol CeO 2 and 0.01 mmol Tb 4 o 7 After the powder is uniformly mixed, it is sintered at 1250°C to form a ceramic target with a diameter of 50 and a thickness of 2mm in the shape of a round cake, and the target is placed in a vacuum chamber, and the substrate is ITO glass. Toluene, acetone and ethanol were ultrasonically cleaned for 5 minutes, then rinsed with distilled water, treated with oxygen plasma, and placed in a vacuum chamber. Set the distance between the target and the substrate as 60mm, and use a mechanical pump and a molecular pump to pump the vacuum of the cavity to 5.0×10 -4 Pa; Oxygen is used as the working gas flow, the working gas flow rate is 20sccm, the pressure is adjusted to 3.0Pa, the substrate temperature is 500°C, and the pulse laser energy is 150W, and the deposition of the film is started. The thickness of the film is deposited to 130nm, and the chemical formula of the cerium-terbium double-doped calcium sulfate lumin...

Embodiment 2

[0064] 0.96mmol CaSO 4 , 0.05 mmol CeO 2 and 0.0025 mmol Tb 4 o 7 After the powder is uniformly mixed, it is sintered at 900 ° C to form a ceramic target with a diameter of 50 and a thickness of 2 mm, and the target is placed in a vacuum chamber, and the substrate is ITO glass. Ultrasonic cleaning for 5 minutes, then rinsed with distilled water, treated with oxygen plasma, and placed in a vacuum chamber. Set the distance between the target and the substrate as 60mm, and use the mechanical pump and the molecular pump to pump the vacuum of the cavity to 1.0×10 -3 Pa; Oxygen is used as the working gas flow, the working gas flow rate is 10 sccm, the pressure is adjusted to 0.5 Pa, the substrate temperature is 250°C, and the pulse laser energy is 80W, and the deposition of the film is started. The thickness of the film is deposited to 300mm, and the chemical formula of the cerium-terbium double-doped calcium sulfate luminescent film obtained by taking out the sample is Ca 0.94...

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Abstract

The invention discloses a cerium-terbium co-doped calcium sulfate luminous film with chemical formula of Ca(1-x-y)SO4:xCe<3+>, yTb<3+>, wherein 0.01<=x<=0.05, 0.01<=y<=0.08, Ca(1-x-y)SO4 is the matrix, and the cerium element and terbium element are active elements. In the electroluminescence spectrum (EL) of the cerium-terbium co-doped calcium sulfate luminous film, strong luminescence peaks appear at the positions of 490nm and 510nm, and the cerium-terbium co-doped calcium sulfate luminous film can be applied to a film electroluminescent display. The invention also provides a preparation method of the cerium-terbium co-doped calcium sulfate luminous film and an application thereof.

Description

【Technical field】 [0001] The invention relates to a cerium terbium double-doped calcium sulfate luminescent film and a preparation method thereof, a thin film electroluminescent device and a preparation method thereof. 【Background technique】 [0002] Thin film electroluminescent display (TFELD) has attracted widespread attention and developed rapidly due to its advantages such as active light emission, full solid state, impact resistance, fast response, large viewing angle, wide application temperature, and simple process. At present, the research of color and even full-color TFELD and the development of multi-band luminescent films are the development direction of this subject. However, cerium and terbium double-doped calcium sulfate light-emitting films that can be applied to thin-film electroluminescent displays have not been reported yet. 【Content of invention】 [0003] Based on this, it is necessary to provide a cerium-terbium double-doped calcium sulfate light-emitt...

Claims

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Application Information

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IPC IPC(8): C09K11/56H01L33/50
Inventor 周明杰王平陈吉星张振华
Owner OCEANS KING LIGHTING SCI&TECH CO LTD
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