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Samarium-doped rare earth borate luminous film as well as preparation method and application thereof

A technology of luminescent thin film and borate, applied in luminescent materials, chemical instruments and methods, semiconductor devices, etc.

Inactive Publication Date: 2014-05-21
OCEANS KING LIGHTING SCI&TECH CO LTD +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But, the samarium-doped rare-earth borate light-emitting film that can be applied to the thin film electroluminescent display has not been reported yet.

Method used

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  • Samarium-doped rare earth borate luminous film as well as preparation method and application thereof
  • Samarium-doped rare earth borate luminous film as well as preparation method and application thereof
  • Samarium-doped rare earth borate luminous film as well as preparation method and application thereof

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preparation example Construction

[0032] The preparation method of the above-mentioned samarium-doped rare earth borate luminescent film comprises the following steps:

[0033] Step S11, according to MeBO 3 :xSm 3+ The stoichiometric ratio of each element will be Me 2 o 3 , B 2 o 3 and Sm 2 o 3 The powder, after mixing, is sintered at 900°C to 1300°C to obtain the target;

[0034] Load the substrate into the reaction chamber of the chemical vapor deposition equipment, and set the vacuum degree of the reaction chamber to 1.0×10 -3 Pa~1.0×10 -5 Pa.

[0035] In this embodiment, the substrate is indium tin oxide glass (ITO). It can be understood that in other embodiments, it can also be fluorine-doped tin oxide glass (FTO), aluminum-doped zinc oxide (AZO) or indium-doped glass. zinc oxide (IZO); the substrate was ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber.

[0036] Preferably, the tar...

Embodiment 1

[0058] 0.97mmol Y 2 o 3 , 1 mmol B 2 o 3 and 0.03mmol Sm 2 o 3 After the powder is uniformly mixed, it is sintered at 1250°C to form a ceramic target with a diameter of 50 and a thickness of 2mm in the shape of a round cake, and the target is placed in a vacuum chamber, and the substrate is ITO glass. Toluene, acetone and ethanol were ultrasonically cleaned for 5 minutes, then rinsed with distilled water, treated with oxygen plasma, and placed in a vacuum chamber. Set the distance between the target and the substrate as 60mm, and use a mechanical pump and a molecular pump to pump the vacuum of the cavity to 5.0×10 -4 Pa; Oxygen is used as the working gas flow, the working gas flow rate is 20sccm, the pressure is adjusted to 3.0Pa, the substrate temperature is 500°C, and the pulse laser energy is 150W, and the deposition of the film is started. The thickness of the film is deposited to 120nm, and the chemical formula of the samarium-doped rare earth borate luminescent fil...

Embodiment 2

[0064] 0.99mmol Y 2 o 3 , 1 mmol B 2 o 3 and 0.01 mmol Sm 2 o 3 After the powder is uniformly mixed, it is sintered at 900 ° C to form a ceramic target with a diameter of 50 and a thickness of 2 mm, and the target is placed in a vacuum chamber, and the substrate is ITO glass. Ultrasonic cleaning for 5 minutes, then rinsed with distilled water, treated with oxygen plasma, and placed in a vacuum chamber. Set the distance between the target and the substrate as 60mm, and use the mechanical pump and the molecular pump to pump the vacuum of the cavity to 1.0×10 -3 Pa; Oxygen is used as the working gas flow, the working gas flow rate is 10 sccm, the pressure is adjusted to 0.5 Pa, the substrate temperature is 250°C, and the pulse laser energy is 80W, and the deposition of the film is started. The thickness of the film is deposited to 50nm, and the chemical formula of the samarium-doped rare earth borate luminescent film obtained by taking out the sample is YBO 3 :0.01Sm 3+ ....

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Abstract

The invention discloses a samarium-doped rare earth borate luminous film which has a chemical formula of MeBO3:xSm<3+>, wherein x is more than or equal to 0.01 and less than or equal to 0.05, MeBO3 is a matrix, the samarium element is an active element, and Me is Y, La, Gd or Lu. The samarium-doped rare earth borate luminous film has high luminous peaks at the positions of 638nm and 727nm in an electroluminescent spectrum (EL) and can be applied to a thin-film electroluminescent display. The invention also provides a preparation method and application of the samarium-doped rare earth borate luminous film.

Description

【Technical field】 [0001] The invention relates to a samarium-doped rare-earth borate light-emitting thin film and its preparation method, and a thin-film electroluminescent device and its preparation method. 【Background technique】 [0002] Thin film electroluminescent display (TFELD) has attracted widespread attention and developed rapidly due to its advantages such as active light emission, full solid state, impact resistance, fast response, large viewing angle, wide application temperature, and simple process. At present, the research of color and even full-color TFELD and the development of multi-band luminescent films are the development direction of this subject. However, there is no report on the samarium-doped rare earth borate light-emitting thin film that can be applied to thin-film electroluminescent displays. 【Content of invention】 [0003] Based on this, it is necessary to provide a samarium-doped rare-earth borate light-emitting thin film applicable to thin-f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K11/78H01L33/50H01L33/00
Inventor 周明杰王平陈吉星张振华
Owner OCEANS KING LIGHTING SCI&TECH CO LTD
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