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Pallet lifting device, preheating equipment and cooling method for high-temperature pallets

The technology of a lifting device and a jacking device is applied to the cooling of preheating equipment and high-temperature trays, and the field of tray lifting devices can solve the problems of low heat convection heat transfer efficiency and long time consumption, and achieve easy implementation, fast cooling speed, and shortened process. effect of cycles

Active Publication Date: 2016-04-27
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since convective heat transfer is also relatively inefficient, a large amount of gas is required to bring the tray to the desired temperature, and it takes a long time

Method used

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  • Pallet lifting device, preheating equipment and cooling method for high-temperature pallets
  • Pallet lifting device, preheating equipment and cooling method for high-temperature pallets
  • Pallet lifting device, preheating equipment and cooling method for high-temperature pallets

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Embodiment Construction

[0044] The invention provides a tray lifting device, preheating equipment and a cooling method for high-temperature trays, which can realize the operations of heating and cooling two trays with the same lifting device, effectively improve the cooling speed of the trays, and shorten the process cycle , thereby improving production efficiency.

[0045] In the following description, for purposes of illustration rather than limitation, specific details such as specific system architectures, interfaces, and techniques are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.

[0046] The pallet lifting device of the present inven...

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PUM

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Abstract

The invention discloses a tray lifting device, a preheating apparatus and a method for cooling a high-temperature tray, and relates to the field of semiconductor equipment manufacturing. The speed of cooling of the tray can be effectively increased, and the process cycle can be shortened. The tray lifting device is arranged in a preheating chamber, and a cooling device is arranged on the inner wall of the bottom of the preheating chamber. The tray lifting device comprises a lifting driving device, a supporting frame, a jacking device and a cooling bearing component, wherein the lifting driving device is connected with the supporting frame, and is used for driving the supporting frame to carry out lifting motion in the preheating chamber, the jacking device is arranged on the upper surface of the supporting frame, and is used for bearing the tray to be heated, the cooling bearing component is arranged on the lower surface of the supporting frame, and is used for bearing the tray which is processed through the bearing technology and needs to be cooled.

Description

technical field [0001] The invention relates to the field of semiconductor equipment manufacturing, in particular to a tray lifting device, preheating equipment and a cooling method for high-temperature trays. Background technique [0002] In the process of depositing ITO (Indium Tin Oxides, nano-indium tin metal oxide) film on LED (Light Emitting Diode, light emitting diode) chips, it is necessary to heat the sapphire substrate to obtain an ITO film layer with better conductivity and higher transmittance , and its process temperature is about 300°C. The process flow is: the tray loaded with process sheets is transferred to the preheating chamber to be heated to 250-300°C, then transferred to the process chamber to deposit the ITO film, and finally taken out manually. At this time, the temperature of the tray is high, which may easily cause personnel burns. Therefore, it is necessary to increase the step of cooling the tray in the process flow. [0003] There are three ma...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67H01L21/00
CPCH01L21/67103H01L21/68742H01L2221/68368
Inventor 武学伟
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD