MEMS (micro electro mechanical system) optical scanning probe capable of switching work modes

A technology of optical scanning and working mode, applied in the field of MEMS optical scanning probe, can solve the problem of increasing the size of the probe, and achieve the effect of reducing the overall size, easy production and processing, and flexible use

Active Publication Date: 2014-06-18
无锡微文半导体科技有限公司
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  • Abstract
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Problems solved by technology

It has certain advantages, but it also has certain limitations, correspondingly increasing the size of the probe. The core problem of OCT technology applied to endoscopy lies in the miniaturization of its endoscopic probe

Method used

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  • MEMS (micro electro mechanical system) optical scanning probe capable of switching work modes
  • MEMS (micro electro mechanical system) optical scanning probe capable of switching work modes
  • MEMS (micro electro mechanical system) optical scanning probe capable of switching work modes

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Embodiment Construction

[0031] Figure 1 to Figure 3 As shown, it is a first embodiment of a MEMS optical scanning probe with switchable working mode, including a housing 45 and a main body base 47 assembled therein; the groove on the upper side of the main body base 47 is provided with Lens assembly 48, first MEMS micromirror 46 is arranged in the groove of its slope; The second MEMS micromirror 44 is arranged in the groove of described main body base 47 lower side; to the first MEMS micromirror 46, and then reflected to the second MEMS micromirror 44 by the first MEMS micromirror 46; the external circuit controls the on-off of the voltage on the second MEMS micromirror 44, and then controls the first MEMS micromirror 44 The two MEMS micromirrors 44 are in a state of warping in space or flattening in space, so as to realize arbitrary switching of the probe among forward scanning, side scanning and side forward scanning. Wherein, the front side and the front end of the housing are respectively provi...

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Abstract

The invention discloses an MEMS (micro electro mechanical system) optical scanning probe capable of switching work modes. The MEMS optical scanning probe comprises a case and a main body base assembled in the case, wherein a lens assembly is arranged in a groove formed in the upper side of the main body base, a first MEMS micro lens is arranged in a groove of the slope surface of the main body base, a second MEMS micro lens is arranged in a groove formed in the lower side of the main body base, light beams are emitted onto the first MEMS micro lens through a lens assembly via optical fibers and are then reflected onto the second MEMS micro lens through the first MEMS micro lens, an external circuit controls the on-off state of the voltage on the second MEMS micro lens, further, the second MEMS micro lens is controlled to be in the in-space tilting or in-space flat expanding state for realizing the free switching among the forward scanning, the lateral scanning and the lateral forward scanning of the probe. The MEMS optical scanning probe has the advantages that the probe only adopts one lens assembly, so the double MEMS micro lenses can realize the switching of various work modes, and the use is more flexible.

Description

technical field [0001] The invention relates to a MEMS optical scanning probe with switchable working mode. Background technique [0002] Combining microelectromechanical systems (MEMS) scanning micromirrors with Optical Coherence Tomography (OCT) technology to develop endoscopic imaging systems is the main development project of the patent applicant. The patent of one of the applicants of the present invention (the name of the invention is: a dual-working mode MEMS optical probe; the patent number is: 201220535288.9). And patent (invention name: a MEMS optical probe, patent number: 201220497934.7). The above-mentioned patent breaks the mode that can only work in one direction, and can not only realize the lateral scanning of the side wall of the tissue sample, but also realize the forward scanning of the internal organs and relatively hidden tissues of the human body. It has certain advantages, but it also has certain limitations, and the size of the probe is correspondin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/00A61B1/00G01N21/88G01N21/00
Inventor 王元光谢会开陈巧周寅周正伟
Owner 无锡微文半导体科技有限公司
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