Scanning electron microscope equipped with back scattered electron detection function

Abstract

The present invention relates to a scanning electron microscope equipped with a back scattered electron detection function, which causes primary electrons generated from a light source to enter a specimen, and after the primary electrons have entered therein, detects emitted electrons which are emitted from the specimen. The scanning electron microscope equipped with a back scattered electron detection function is characterised by comprising: a Wien filter unit, which is arranged between the light source and the specimen, and which separates the emitted electrons into secondary electrons and back scattered electrons by generating a magnetic field and an electric field; and a detecting unit which detects the secondary electrons and back scattered electrons separated by the Wien filter unit. Thus, provided is a scanning electron microscope equipped with a back scattered electron detection function which enables the separation and detection of secondary electrons and back-scattered electrons due to the use of a Wien filter.

Description

technical field [0001] The present invention relates to a scanning electron microscope capable of detecting reflected electrons, and more specifically to a scanning electron microscope capable of easily separating secondary electrons and reflected electrons emitted from a sample through a Wien velocity filter, and detecting the secondary electrons separately. Scanning Electron Microscope with Reflection Electron Detection for Electrons and Reflected Electrons. Background technique [0002] Recently, with the miniaturization trend of information equipment and the industrialization of ultra-fine technology in the field of advanced materials, there is an urgent need for information on the fine structure and surface shape of materials. In particular, since the second half of the 1990s, nano research has been actively carried out on a global scale, and various studies have been carried out to clarify the structure and characteristics of nano substances, and electron microscopes p...

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Problems solved by technology

[0006] However, various forms of electrons are emitted according to the interaction of the original electrons pe and the penetration depth into the sample S, and although various characteristics of the sample can be detected by detecting the various forms of electrons emitted from the sample, In the case of using the conventional scanning electron microscope 10, only the secondary electrons se are used as detection targets, and other electrons emitted from the sample cannot be detected.

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