Scanning electron microscope equipped with back scattered electron detection function

An electron microscope and reflected electron technology, applied in circuits, discharge tubes, electrical components, etc., can solve problems such as inability to detect defects, and achieve the effect of improving detection accuracy

Inactive Publication Date: 2014-06-25
SNU PRECISION CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, various forms of electrons are emitted according to the interaction of the original electrons pe and the penetration depth into the sample S, and although various characteristics of the sample can be detected by detecting the vari

Method used

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  • Scanning electron microscope equipped with back scattered electron detection function
  • Scanning electron microscope equipped with back scattered electron detection function
  • Scanning electron microscope equipped with back scattered electron detection function

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Embodiment Construction

[0026] Before proceeding with the description of the present invention, it should be explained that in a plurality of embodiments, the same reference numerals are used for structural elements having the same structure and are representatively described in the first embodiment, and in other embodiments The structure different from that of the first embodiment will be described in the following.

[0027] Next, a scanning electron microscope having a reflection electron detection function according to a first embodiment of the present invention will be described in detail with reference to the drawings.

[0028] figure 2 It is a schematic cross-sectional view of a scanning electron microscope with a reflected electron detection function according to the first embodiment of the present invention.

[0029] refer to figure 2 , the scanning electron microscope 100 with the reflected electron detection function of the first embodiment of the present invention includes a lens barre...

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Abstract

The present invention relates to a scanning electron microscope equipped with a back scattered electron detection function, which causes primary electrons generated from a light source to enter a specimen, and after the primary electrons have entered therein, detects emitted electrons which are emitted from the specimen. The scanning electron microscope equipped with a back scattered electron detection function is characterised by comprising: a Wien filter unit, which is arranged between the light source and the specimen, and which separates the emitted electrons into secondary electrons and back scattered electrons by generating a magnetic field and an electric field; and a detecting unit which detects the secondary electrons and back scattered electrons separated by the Wien filter unit. Thus, provided is a scanning electron microscope equipped with a back scattered electron detection function which enables the separation and detection of secondary electrons and back-scattered electrons due to the use of a Wien filter.

Description

technical field [0001] The present invention relates to a scanning electron microscope capable of detecting reflected electrons, and more specifically to a scanning electron microscope capable of easily separating secondary electrons and reflected electrons emitted from a sample through a Wien velocity filter, and detecting the secondary electrons separately. Scanning Electron Microscope with Reflection Electron Detection for Electrons and Reflected Electrons. Background technique [0002] Recently, with the miniaturization trend of information equipment and the industrialization of ultra-fine technology in the field of advanced materials, there is an urgent need for information on the fine structure and surface shape of materials. In particular, since the second half of the 1990s, nano research has been actively carried out on a global scale, and various studies have been carried out to clarify the structure and characteristics of nano substances, and electron microscopes p...

Claims

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Application Information

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IPC IPC(8): H01J37/28H01J37/244
CPCH01J37/05H01J37/244H01J2237/24475H01J2237/24495H01J2237/24485H01J37/28H01J2237/2448
Inventor 金锡安宰亨金宰湖
Owner SNU PRECISION CO LTD
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