Thin Film Transistor Array Panel And Manufacturing Method Thereof

Abstract

The invention provides a thin film transistor array panel and a manufacturing method thereof. Instead of forming contact holes the same way in both the non-image forming peripheral area (PA) and the image forming display area of a thin film transistor array panel, contact holes in the DA are formed to be substantially smaller than those in the PA for thereby improving an aperture ratio of the corresponding display device. In an exemplary embodiment, an inorganic gate insulating layer is not etched in the DA and only an inorganic first passivation layer among inorganic insulating layers positioned in the DA is etched to allow communication between the drain electrode and the corresponding field generating electrode.; On the other hand, in the peripheral area, plural inorganic insulating layers such as the gate insulating layer, the first passivation layer, and the second passivation layer positioned on the gate wire and the data wire are simultaneously etched to form second contact holes and third contact holes exposing respective gate pads and data pads.

Description

technical field [0001] The present disclosure relates to a thin film transistor array panel and a manufacturing method thereof. Background technique [0002] Currently, a liquid crystal display is widely used as a thin panel display (for example, a flat panel or a curved panel). A typical liquid crystal display (LCD) has two spaced apart panels on which electric field generating electrodes are disposed, such as pixel electrodes on one panel and a common electrode on the other panel. A layer of liquid crystal material is interposed between the panels. The liquid crystal display is driven to apply a voltage across the field generating electrodes to generate a corresponding electric field extending into or through the liquid crystal layer. These then determine the alignment of the liquid crystal molecules of the liquid crystal layer and thus the polarization effect applied to the transmitted light, thereby forming an image for display to the user who perceives the electric fi...

AI Technical Summary

Problems solved by technology

[0005] When the width of the contact holes becomes larger in this way, they occupy the limited surface area allocated to each pixel unit, and the aperture ratio of the liquid crystal display using the thin film transistor array panel will be degraded accordingly

[0006] Meanwhile, when the drain contact hole is formed in the region where both the gate line and the drain electrode exist, in the case of etching through the gate insulating layer and passing through the passivation layer together, when the formed drain contact hole and When the gate lines of the corresponding thin film transistors (TFTs) partially overlap, a short circuit between the drain electrode and the gate line may occur, thereby causing a short circuit defect

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