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Device and method for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne

A technology of glass thickness and laser heterodyning, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of large error and singleness in measuring glass thickness

Inactive Publication Date: 2017-01-04
HEILONGJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention solves the problem that only a single parameter value to be measured can be obtained after spectrum demodulation of the existing laser heterodyne signal, resulting in a large error in measuring glass thickness

Method used

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  • Device and method for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne
  • Device and method for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne
  • Device and method for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne

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specific Embodiment approach 1

[0040] Specific implementation mode 1. Combination figure 1 , figure 2 Describe this embodiment, the device for measuring glass thickness by linear frequency modulation multi-beam laser heterodyne described in this embodiment, the device includes a digital signal processor 1, an A / D converter 2, a preamplifier 3, a filter 4, a photoelectric detector Device 5, converging lens 6, flat glass 7, No. 1 reflector 8, No. 2 reflector 9 and FM laser 10;

[0041] The laser light emitted by the frequency-modulated laser 10 is reflected by the second reflector 9 and is incident on the first reflector 8, and the light beam reflected by the first reflector 8 is incident on the flat glass 7; The rear surface of the glass 7 is reflected multiple times to obtain multiple beams of reflected light, and after being transmitted through the flat glass 7, the multiple beams of reflected light are converged to the photosensitive surface of the photodetector 6 through the converging lens 6;

[0042...

specific Embodiment approach 2

[0045] Embodiment 2. This embodiment is a further description of the device for measuring glass thickness by chirped multi-beam laser heterodyne described in Embodiment 1. The filter 4 is a low-pass filter.

specific Embodiment approach 3

[0046] Specific Embodiment 3. This embodiment is a method of measuring glass thickness using the device for measuring glass thickness with a chirped multi-beam laser heterodyne described in Specific Embodiment 1. The specific steps of the method are:

[0047] Step 1. Use the frequency-modulated laser 10 to emit laser light. The laser beam is reflected twice by the No. 1 reflector 8 and No. 2 reflector 9 and then obliquely shoots to the flat glass 7; at the same time, record the incident angle θ of the obliquely incident light beam on the flat glass 7 0and measure the optical path 1 between the frequency modulation laser 10 emitting laser to the incident flat glass 7, calculate the incident light field E (t) and the reflected light field E of the flat glass 7 1 (t) and the light field E of the light transmitted through the flat glass being reflected multiple times by the flat glass at different times 2 (t),E 3 (t),...,E m (t)...;

[0048] The mathematical expression of the i...

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Abstract

The invention discloses a device and a method for measuring glass thickness through linear frequency modulation multi-beam laser heterodyne and belongs to the technical field of precision glass thickness measurement. The device and the method for measuring the glass thickness through the linear frequency modulation multi-beam laser heterodyne solve the problem that the glass thickness measurement error is large due to the fact that only single to-be-measured parameters are obtained after the existing laser heterodyne signal frequency spectrums are demodulated. Laser emitted from a frequency modulation laser enters into a first reflecting mirror after being reflected through a second reflecting mirror and light beams enter into plain glass after being reflected through the first reelecting mirror; a plurality of beams of reflecting light is obtained after the incident light is reflected by the front surface and the rear surface of the plane glass for a plurality of times; the plurality of beams of reflecting light is converged to the photosensitive surface of a photoelectric detector through a convergent lens after being transmitted through the plain glass; current signals are sent to a filter after being performed photovoltaic conversion through the photoelectric detector, the signals are output to a front arranged amplifier after being filtered through the filter, and the signals are sent to a digital signal processor after being performed conversion through an A / D (Analog to Digital) converter. The device and the method for measuring the glass thickness through the linear frequency modulation multi-beam laser heterodyne are applicable to measurement of the glass thickness.

Description

technical field [0001] The invention belongs to the technical field of precision glass thickness measurement. Background technique [0002] Precision glass thickness measurement is a problem that needs to be faced and solved in the engineering field. With the development of science and technology, thickness measurement methods are constantly being introduced, including optical measurement, interferometry and diffraction. These methods generally cannot meet the requirements of high-accuracy angle measurement. [0003] Since optical thickness measurement has attracted much attention because of its non-contact, high precision and simple structure, the method of using optical thickness measurement has been more and more widely used. In the optical measurement method, the laser heterodyne measurement technology inherits many advantages of the laser heterodyne technology, and is one of the current ultra-high-precision measurement methods, but the traditional laser heterodyne sig...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/06
Inventor 冉玲苓李彦超杨九如高扬柳春郁杨瑞海杜军丁群王春晖马立峰于伟波
Owner HEILONGJIANG UNIV