Device for detecting PM2.5 particulate matters based on disc micro-machine resonator

A micromechanical resonator, particle detection technology, applied in measurement devices, particle suspension analysis, scientific instruments, etc., can solve the problems of low integration, large volume, low precision, etc., achieve small volume and power consumption, reduce volume effect on power consumption, good resonance performance and detection accuracy reliability

Inactive Publication Date: 2014-07-23
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The technical problem to be solved in the present invention is to use a device constructed of micro-electromechanical system devices to detect the concentration of PM2.5 airborne particulate matter with

Method used

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  • Device for detecting PM2.5 particulate matters based on disc micro-machine resonator
  • Device for detecting PM2.5 particulate matters based on disc micro-machine resonator
  • Device for detecting PM2.5 particulate matters based on disc micro-machine resonator

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Embodiment 1

[0027] The specific implementation steps of a disc micromechanical resonator-based PM2.5 particle detection device disclosed in this embodiment are as follows:

[0028] Step 1. Expose the device to the air to be tested. The collected air sample enters the sample pretreatment chamber through the air sample inlet. The particles in the air sample are charged by the electrostatic drive and adsorption device after pre-charging treatment.

[0029] Step 2. The particles in the air sample are screened by particle diameter through the particle filter device, the particles with a diameter of less than 2.5 microns pass the screening, and the particles with a diameter of more than 2.5 microns are blocked.

[0030] Step 3. The aluminum nitride disc resonator is in the working state of simple harmonic vibration. PM2.5 particles are deposited on the corresponding position of the resonant disk under electrostatic drive, changing the resonance mode of the disk.

[0031] Step 4. Connect the DC...

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Abstract

The invention discloses a device for detecting PM2.5 particulate matters based on a disc micro-machine resonator and provides a novel mass method detection mechanism of PM2.5 particulate matters based on a planar resonant mode of an aluminum nitride disc resonator. The novel mass method detection mechanism is used for detecting concentration of PM2.5 particulate matters in air by detecting change of resonant frequency of the disc resonator under the condition of deposition particulate matters. An electrostatic driving and absorbing device of PM2.5 particulate matters in air, a particulate matter filtering device, a mass method detecting micro-machine sensing unit are manufactured by using an MEMS (Micro-electromechanical System) manufacturing and integrating process based on the detection mechanism; the structures are integrated in a micro integrated encapsulation unit to form the device for detecting PM2.5 particulate matters so as to realize high-precision and quick detection of the PM2.5 particulate matters in air; micro-machine devices manufactured by using the MEMS process are used in the device for detecting PM2.5 particulate matters, so that the size and the power consumption of the detection device are reduced, the microminiaturization and the integration of the detection device are realized, the detection precision and the detection speed of the PM2.5 are improved and the resonance performance and the detection precision reliability are improved.

Description

Technical field: [0001] The invention relates to a PM2.5 air suspended particle detection device using an aluminum nitride disc micromechanical resonator. The invention belongs to the field of microelectromechanical system device application and air environment monitoring equipment. Background technique: [0002] Air particle concentration monitoring is an important part of air pollution monitoring and prevention work, and is an important work content for building a people-oriented environment-friendly society. Air pollution with PM2.5 high-concentration fine particle pollution as the main form seriously threatens public health, deteriorates public perception and residents' living standards, and has a negative impact on the national economy. Air pollution has a potential long-term risk of harm. The incubation period is long and the impact is eliminated. Difficulties will cause immeasurable losses to my country's social development and economic construction in the future. Th...

Claims

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Application Information

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IPC IPC(8): G01N15/06
Inventor 王刚徐立新王婷卢冲赢韩琦丛琳
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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