Single-mass-block three-axis MEMS accelerometer with three frame structures

Abstract

The invention discloses a single-mass-block three-axis MEMS accelerometer with three frame structures. The single-mass-block three-axis MEMS accelerometer with the three frame structures comprises the three frame structures, namely a suspension inner frame, a suspension outer frame and a fixed frame, wherein the fixed frame is in sealed connection with a base through a bonding method, and the three frame structures are arranged symmetrically in a rectangular shape or an annular shape. The single-mass-block three-axis MEMS accelerometer with the three frame structures further comprises elastic sensing beams arranged in the X-axis direction, the Y-axis direction and the Z-axis direction respectively, wherein a varistor on the sensing beam in the X-axis direction is arranged on a bridge arm of a bridge in a series-connection mode, the variation of the varistor on the sensing beam in the X-axis direction can reduce coupling with the Y axis and the Z axis, the variation of a varistor on the sensing beam in the Y-axis direction can reduce coupling with the X axis and the Z axis, and the variation of a varistor on the sensing beam in the Z-axis direction can reduce coupling with the X axis and the Y axis. The single-mass-block three-axis MEMS accelerometer with the three frame structures is ingenious in design, is high in product yield, and resolves the problems that a single-mass-block three-axis MEMS accelerometer in the prior art is too large in inter-axis coupling, low in sensitivity and low measurement accuracy.

Description

Technical field [0001] The invention relates to the field of instruments for measuring acceleration, in particular to a single-mass three-axis MEMS accelerometer with a three-frame structure. Background technique [0002] Accelerometer is an instrument used to measure acceleration, which has important application value in aerospace, navigation, and automobiles. With the rise of the Micro-Electro-Mechanical Systems (Micro-Electro-Mechanical Systems) industry, accelerometers are gradually developing towards miniaturization and integration. MEMS accelerometer has the advantages of small size, light weight, low cost, low power consumption, and easy mass production. It has been widely used in vehicles, testing, aerospace, daily sports monitoring, games, and some consumer electronic products. MEMS acceleration sensors are usually divided into piezoresistive, capacitive, piezoelectric and other types. Among them, the piezoresistive MEMS acceleration sensor has small size, no hysteresi...

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Problems solved by technology

[0004] The invention provides a single-mass three-axis MEMS accelerometer with a three-frame structure, which solves the problems of excessive inter-axis coupling, low sensitivity, and low measurement accuracy of single-mass piezoresistive three-axis MEMS acceleration sensors in the prior art. , and at the same time, the structure should be simple, so as to avoid the low yield rate of products caused by too complicated process

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