Unlock instant, AI-driven research and patent intelligence for your innovation.

Process for production of silane and hydrohalosilanes

A technology of hydrosilane and logistics, applied in chemical instruments and methods, sustainable manufacturing/processing, silicon hydride, etc., can solve problems such as narrow temperature range

Active Publication Date: 2014-07-23
SHAANXI NON FERROUS TIAN HONG REC SILICON MATERIAL CO LTD
View PDF8 Cites 3 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Third, the temperature range over which chemical reactions behave with favorable kinetics and without undesired side reactions is rather narrow
However, there are key impurities, mainly boron and phosphorus hydrides, which boil very close to silane, making extreme purification necessary for ultrapure silane useful for electrical applications

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Process for production of silane and hydrohalosilanes
  • Process for production of silane and hydrohalosilanes
  • Process for production of silane and hydrohalosilanes

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0056] right as in figure 2 The process system arranged in is fed with 25% HSiCl at a rate of 28.57 kg-mol / h 3 and 75% SiCl 4 The mixed chlorosilanes of composition (A) were fed to the reactant stream inlet 1 of a multi-zone fractional distillation column 2 operating at a pressure of 600 kPa. A liquid side draw (B) was withdrawn from the first distillate stream outlet 5 at a rate of 66.46 kg-mol / hr. The composition of the side draw (B) is 2% H 2 SiCl 2 , 97.2% HSiCl 3 and 0.6% SiCl 4-- yields a Cl:Si molar ratio of 2.96. This side draw (B) was passed as a liquid through a packed bed reactor 7 containing dimethylamine-functionalized styrene-divinylbenzene macroreticular resin (DOWEX MWA-1). Make the reactor product (C), which contains 0.01% SiH 4 , 0.3%H 3 SiCl, 8.7%H 2 SiCl 2 , 77.6% HSiCl 3 , 13.3% SiCl 4 The liquid mixture is returned to the first distillation column 2 at a point 8 positioned between the reactant stream inlet 1 and the first distillate stream o...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Embodiments of a system and process for the production of ultra-high purity silane and hydrohalosilanes of the general formula HySiX4-y (y = 1, 2, or 3) by a reactive distillation method are disclosed.

Description

[0001] Cross References to Related Applications [0002] This application is a continuation-in-part of US Application Serial No. 13 / 328,820, filed December 16, 2011, which is hereby incorporated by reference in its entirety. technical field [0003] The present invention relates to the manufacture of silanes and the general formula H y SiX 4-y System and reactive distillation of hydrohalosilanes (y=1, 2 or 3). Background technique [0004] Silane (SiH 4 ), chlorosilane (H 3 SiCl) and dichlorosilane (H 2 SiCl 2 ) are useful chemicals for the fabrication of electronic devices based on high-purity crystalline silicon. These silicon-carrying gases are thermally decomposed to form high-purity silicon material. The manufacture of high-purity silanes is currently done on an industrial scale by figure 1 shown generally in and carried out by the method generally described in US 4,676,967, in which metallurgical grade silicon is first gasified by reaction of hydrogen with sili...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C01B33/04B01J19/24
CPCC01B33/043C01B33/1071C01B33/10778Y02P20/10
Inventor 威廉·C·布勒内曼
Owner SHAANXI NON FERROUS TIAN HONG REC SILICON MATERIAL CO LTD