Silica-based uniwafer optoelectronic integration receiving chip used for automatic electricity meter reading system
A meter reading system, silicon-based single-chip technology, applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems of unfavorable promotion and popularization of plastic optical fiber communication technology, complex manufacturing and assembly process, and influence on system reliability. Poor short wave response, reduce junction capacitance, and overcome the effect of large junction capacitance
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[0029] The following embodiments will further illustrate the present invention in conjunction with the accompanying drawings.
[0030] see Figure 1~6 , the embodiment of the present invention is provided with a silicon-based photodetector and an amplifying integrated circuit followed by the silicon-based photodetector;
[0031] The silicon-based photodetector adopts an "N+ / N-Well / P-Sub" structure, and the vertical structure of the silicon-based photodetector is as follows from bottom to top: the first layer is a low-doped P-type silicon substrate ( P-Substrate) 1; the second layer is N well (N-Well) 2; the third layer is N-type heavily doped silicon (N+) 4, P-type heavily doped silicon (P+) 3, metal aluminum (Al) 7; The fourth to sixth layers are three-layer SiO 2 Insulating dielectric layers 5, 8, 9; the seventh layer is Si 3 N 4 Surface passivation layer 10; the P-type silicon substrate (P-Substrate) 1, N well (N-Well) 2, N-type heavily doped silicon (N+) 4, P-type heav...
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