Reflecting type optical isolator and laser machining equipment with the same

Abstract

The invention discloses a reflecting type optical isolator and laser machining equipment with the same. The reflecting type optical isolator comprises a birefringent crystal, a first half wave plate, a beam combining shaping lens group, an optical isolation module, a second half wave plate and a 90-degree phase delay mirror which are arrayed in sequence in the optical-axis direction. The birefringent crystal is used for separating P polarized light from S polarized light. The first half wave plate and the second half wave plate are used for carrying out rotating on a linear polarization direction. The beam combining shaping lens group is used for carrying out beam combining shaping on two P polarized light beams to form a P polarized light beam. The optical isolation module comprises a plurality of zinc selenide plane mirrors which are arranged by Brewster angles and is used for refracting the P polarized light and reflecting the S polarized light. The 90-degree phase delay mirror is used for converting linearly-polarized light into circularly-polarized light. According to the reflecting type optical isolator, the service life of a laser device can be prolonged, and the machining quality and the yield of the laser machining equipment are improved.

Description

【Technical field】 [0001] The invention relates to the field of laser processing, in particular to a reflective optical isolator and laser processing equipment using the reflective optical isolator. 【Background technique】 [0002] Since the first realization of laser output in the 1960s, due to its advantages such as high brightness, monochromaticity, directivity, and coherence, laser has attracted widespread attention and has been widely used in various aspects such as national defense, military, industrial production, and scientific research. In terms of industrial production, laser processing is a method of processing materials using the interaction characteristics of laser beams and substances. Compared with traditional processing methods, laser processing has the advantages of no contact, no stress deformation, small heat-affected zone, wide range of machinable materials, flexible realization of various complex processing, high efficiency and stable quality, etc., so las...

AI Technical Summary

Problems solved by technology

[0003] In the use of high-power CO 2 When the laser is processing, when the high-energy CO 2 When the laser beam irradiates those materials with low absorption rate in the 10.6μm band or materials with high surface finish, the processed workpiece will reflect a large amount of laser energy, and part of the reflected light ...

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