Glass substrate frame for vacuum coating, coating system thereof, and transmission method of coating system
A glass substrate and coating system technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of coating defect glass substrate, coating shadow, damage, etc., to solve the coating shadow, stable transmission , the effect of simple structure
Active Publication Date: 2017-11-24
ZHEJIANG SHANGFANG ELECTRONICS EQUIP
View PDF5 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
However, the clips and supports are in direct contact with the surface of the glass substrate. In actual use, the clips and supports are affected by the vibration of the coating, causing scratches on the surface of the glass substrate, and there is still the problem of coating shadows. After the clips and supports are coated Coating defects caused by film shedding and small particle pollution and the possibility of glass substrate damage
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0023] Below according to accompanying drawing and embodiment the present invention will be described in further detail:
[0024] figure 1 Shown is a front view of a prior art glass substrate fixing jig. The glass substrate 1 is placed on a carrier device 2 and fixed around it with several clamps 3 . During the vacuum coating process, especially the sputtering coating, the glass substrate 1 is in a state of vibration, and the carrying device 2 becomes loose due to long-term clamping and impact with the fixture 3, and the glass substrate 1 is easily broken. Moreover, the unstable supporting force of the fixture will cause uneven coating of the glass substrate; the fixture has accumulated a certain thickness of film due to long-term use. Yield rate after coating.
[0025] Therefore, the present invention designs a glass substrate rack 4 that does not require the use of clamps, aiming at the negative effects brought about by the clamps for fixing the glass substrates. figure...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
A glass substrate frame for vacuum coating, a coating system and a transmission method for the coating system belong to the glass substrate transmission technology and key process equipment in vacuum coating. The glass substrate holder for vacuum coating of the present invention includes at least one concave frame accommodating area with a closed bottom surface or a hollow bottom surface for loading glass substrates. The coating system with the glass substrate rack also includes a glass substrate rack transport device and a coating device arranged parallel to the glass substrate rack. The transmission method using the glass substrate rack is that the glass substrate rack stands obliquely on the glass substrate rack transfer device and the edge of the frame accommodating area forms an oblique angle with the horizontal bottom horizontal line of the glass substrate rack. The glass substrate frame used for vacuum coating and the coating system thereof of the present invention have a simple structure, and the transmission method of the glass substrate frame is used to set the structure of the concave frame accommodation area of the glass substrate frame and the glass substrate frame and the concave frame accommodation area. The respective positional relationship of the fixture replaces the fixture to realize the stable transmission of the glass substrate, which solves the problems of low coating yield rate such as glass substrate coating shadow and small particle pollution due to the influence of the fixture.
Description
technical field [0001] The invention belongs to the glass substrate transmission technology in vacuum coating, in particular to a glass substrate rack used for vacuum coating, a coating system and a transmission method of the coating system. Background technique [0002] Glass substrate is a basic component of liquid crystal display devices and one of the key basic materials for the flat panel display industry. A glass substrate is a thin glass sheet with an extremely smooth surface. The rapid growth of the flat panel display screen, low-e glass and smart glass markets requires coatings of various materials on the surface of the glass substrate. [0003] In the traditional vacuum coating process, the carrying and fixing of the glass substrate is realized by the glass substrate frame with the clamp. Although the glass substrate rack with the clamps can support the glass substrates and avoid the glass substrates from easily shaking, the introduction of the clamps brings some ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/50C23C14/56
Inventor 赵军刘钧陈金良许倩斐
Owner ZHEJIANG SHANGFANG ELECTRONICS EQUIP