Energy-saving polycrystalline silicon ingot furnace with heating container

Abstract

The invention discloses an energy-saving polycrystalline silicon ingot furnace with a heating container, belonging to the technical field of thermal field structure design and manufacture of polycrystalline silicon ingot furnaces. The ingot furnace comprises a furnace body (1), a heater (2), a thermal insulation top plate (4) and a thermal insulation cage body (5), wherein the heater (2) is fixed on the thermal insulation top plate (4), the thermal insulation cage body (5) is arranged in the furnace body (1), the thermal insulation top plate (4) is arranged at the upper part of the thermal insulation cage body (5), and a thermal insulation bottom plate (8) with a support column (10) is arranged at the lower part of the thermal insulation cage body (5); the ingot furnace also comprises a heating container (12), wherein the heating container (12) is fixed in the furnace body (1), the thermal insulation cage body (5) is connected with the heating container (12), and the thermal insulation top plate (4), the thermal insulation cage body (5) and the thermal insulation bottom plate (8) form a closed thermal field cavity. The ingot furnace adopts the heating container, thus effectively improving the heating efficiency, having a good thermal insulation effect, producing high-quality silicon ingots, shortening the time of the whole technology, and lowering energy consumption in the crystallizing process.

Description

technical field [0001] The invention relates to a polysilicon ingot furnace, in particular to an energy-saving polysilicon ingot furnace with a heating cabinet, which belongs to the technical field of thermal field structure design and manufacture of polysilicon ingot furnaces. Background technique [0002] Polysilicon ingot casting furnace is a kind of silicon remelting equipment. During production, polysilicon that has reached a certain purity requirement is loaded into the furnace, heated and melted, oriented crystal growth, heat treatment, and cooled out of the furnace according to process requirements. The core environment of polysilicon remelting and growing is called thermal field. The thermal field not only provides a large amount of heat energy for the melting of polysilicon, but also provides a reasonable temperature gradient during the crystal growth process to obtain polysilicon crystals that meet the requirements. Polysilicon ingot furnace is a kind of polysili...

AI Technical Summary

Problems solved by technology

However, the existing polysilicon ingot furnace is equipped with a heating device, but the heating efficiency is not high, the utilization rate of heat energy is very low, and the heat preservation effect is not obvious.

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