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Acoustic surface wave sensor with double sensitive sources

A surface acoustic wave and sensitive source technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problems of inability to measure multiple parameters, increase the complexity and difficulty of system design, and achieve strong stability and simple device structure. Effect

Inactive Publication Date: 2014-10-15
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

However, if multiple parameters need to be monitored, multiple different sensors are required to measure at the same time, which increases the complexity and difficulty of system design, because multiple parameters cannot be measured at the same position at the same time

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Embodiment Construction

[0014] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0015] Such as figure 1 As shown, the surface acoustic wave sensor with dual sensitive sources of the present invention comprises an LGS substrate 3 on which an interface resonator 2 and an AlN thin film layer 4 are arranged, and the AlN thin film layer 4 completely covers the interface resonator 2, and the AlN thin film A surface resonator 1 is provided on the layer 4, and the vertical projection of the surface resonator 1 coincides with the vertical projection of the interface resonator 2, and the interface resonator 1 and the surface resonator 1 are both the same surface acoustic wave The resonator, the metal film electrode in the surface acoustic wave resonator is made of gold.

[0016] AlN thin films and LGS substrates have different surface acoustic wave propagation characteristics, so their responses to stress and temperature are dif...

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Abstract

An acoustic surface wave sensor with double sensitive sources belongs to the technical field of electronic functional materials and devices. The sensor comprises a substrate, wherein the substrate is an LGS substrate; the substrate is provided with an interface harmonic oscillator and an AlN film layer; the AlN film layer completely covers the interface harmonic oscillator; the AlN film layer is provided with a surface harmonic oscillator; the vertical projection of the surface harmonic oscillator is overlapped with the vertical projection of the interface harmonic oscillator; the interface harmonic oscillator and the surface harmonic oscillator are acoustic surface wave harmonic oscillators; metal film electrodes in the acoustic surface wave harmonic oscillators are made of high-temperature resistant metal. The acoustic surface wave sensor with double sensitive sources is simple in structure, can monitor the stress and temperature efficiently and at the same time, can be applicable for a high-temperature complex environment as LGS, AlN and the high-temperature resistant metal are adopted, has no power source and no wire, and is strong in stability. The acoustic surface wave sensor with double sensitive sources is suitable for monitoring the stress and the temperature at the same time.

Description

technical field [0001] The invention belongs to the technical field of electronic functional materials and devices, and relates to a dual-sensitivity surface acoustic wave sensor, in particular to a dual-sensitivity surface acoustic wave sensor based on LGS and AlN, which simultaneously monitors stress and temperature. Background technique [0002] Surface acoustic waves generally refer to waves of various modes that are generated on the free surface of an elastomer and confined to propagate near the surface or interface. Devices based on surface acoustic wave technology are widely used in wireless communication systems because of their small size, low price, simple process, and excellent performance. In the surface acoustic wave sensor, the surface acoustic wave device is used as the energy conversion or sensing element, and the sensor senses the change of external factors such as temperature, pressure, atmosphere, chemical environment, acceleration, etc., and the transduce...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/25G01K11/26
Inventor 刘兴钊舒琳彭斌张万里王瑜李川
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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