Sheet-type structure oxygen sensor and manufacturing method thereof
The technology of an oxygen sensor and its manufacturing method, which is applied in the field of oxygen sensors, can solve problems such as product appearance bending and product structure asymmetry, and achieve the effects of beautiful appearance, reduced macro cracks, and reasonable structural design
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[0032] Example
[0033] See figure 1 As shown, a chip structure oxygen sensor of the present invention includes a heating body 1, a zirconia solid electrolyte 2, and a supporting structure 3 with insulating characteristics between the heating body 1 and the zirconia solid electrolyte 2; The zirconium solid electrolyte 2, the supporting structure 3, and the heating body 1 are arranged in sequence from top to bottom. A zirconia symmetric layer 4 is also provided between the supporting structure 3 and the heating body 1. The zirconia solid electrolyte 2 is symmetrically distributed relative to the support structure 3; during the sintering process, the sintering stress of the symmetrical zirconia layer 4 and the sintering stress of the zirconia solid electrolyte 2 offsets each other, which can reduce the sintering stress.
[0034] The heating body 1 includes an alumina carrier 11 and a platinum electrode heating circuit 12 arranged on the upper surface of the alumina carrier; the pres...
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