Testing structures and testing method for three-port RF devices
A technology for testing structures and radio frequency devices, applied to instruments, measuring electronics, measuring devices, etc., can solve problems such as expensive
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[0050] Such as Figure 2A to Figure 2C shown, and Figure 3A to Figure 3D Shown are schematic diagrams of test structures 1 to 7 of the embodiments of the present invention, respectively. In the test structure of the three-port radio frequency device in the embodiment of the present invention, the three-port radio frequency device includes port one, port two and port three, and the test structure includes:
[0051] Such as Figure 2A As shown, the test structure one includes a device under test one 1, the device under test one 1 is a three-port radio frequency device, the port one of the device under test one 1 is connected to the G-S-G test port 1a, the device under test one Port 2 of 1 is connected to G-S-G test port 1b, and resistor 3 R3 is connected in series between port 3 of the device under test 1 and the ground.
[0052] Such as Figure 2B As shown, the test structure two includes a device under test two 2, the device under test two 2 is a three-port radio frequenc...
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