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Testing structures and testing method for three-port RF devices

A technology for testing structures and radio frequency devices, applied to instruments, measuring electronics, measuring devices, etc., can solve problems such as expensive

Active Publication Date: 2014-11-12
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the price of three-port or four-port network analyzers is very expensive, while the price of two-port network analyzers is cheap and the technology is mature and popular. Many companies are equipped with two-port network analyzers, but three-port or four-port Network analyzers are not equipped or equipped with less

Method used

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  • Testing structures and testing method for three-port RF devices
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  • Testing structures and testing method for three-port RF devices

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Embodiment 3

[0050] Such as Figure 2A to Figure 2C shown, and Figure 3A to Figure 3D Shown are schematic diagrams of test structures 1 to 7 of the embodiments of the present invention, respectively. In the test structure of the three-port radio frequency device in the embodiment of the present invention, the three-port radio frequency device includes port one, port two and port three, and the test structure includes:

[0051] Such as Figure 2A As shown, the test structure one includes a device under test one 1, the device under test one 1 is a three-port radio frequency device, the port one of the device under test one 1 is connected to the G-S-G test port 1a, the device under test one Port 2 of 1 is connected to G-S-G test port 1b, and resistor 3 R3 is connected in series between port 3 of the device under test 1 and the ground.

[0052] Such as Figure 2B As shown, the test structure two includes a device under test two 2, the device under test two 2 is a three-port radio frequenc...

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Abstract

The invention discloses testing structures for three-port RF devices. The testing structures comprise the first testing structure, the second testing structure and the third testing structure. The tested devices in the three testing structures are identical, sequentially, one port of each device is connected with a resistor in series, and other two ports of each device are connected with G-S-G testing ports; for the resistors connected in series to the first testing structure, the second testing structure and the third testing structure, resistance testing structure sets are arranged respectively, and each resistance testing structure set comprises the fourth testing structure, the fifth testing structure, the sixth testing structure and the seventh testing structure. Each fourth testing structure comprises a tested resistor, and two ports of each tested resistor are connected with the G-S-G testing ports. Each fifth testing structure is an open de-embedding structure of the corresponding fourth testing structure. Each sixth testing structure and each seventh testing structure are a first through de-embedding structure and a second through de-embedding structure of the corresponding fourth testing structure. The invention further discloses a testing method for the three-port RF devices. As RF parameter testing of the three-port RF devices can be achieved through a two-port network analyzer, testing cost can be greatly lowered, and testing efficiency can be improved.

Description

technical field [0001] The invention relates to the manufacturing field of semiconductor integrated circuits, in particular to a test structure of a three-port radio frequency device; the invention also relates to a test method of a three-port radio frequency device. Background technique [0002] In semiconductor integrated circuits integrated with radio frequency devices, three-port radio frequency devices are commonly used devices, such as transistors, transformers, and radio frequency resistors. The radio frequency parametric model of the radio frequency device carries out the design of the semiconductor integrated circuit integrated with the radio frequency device. In order to obtain the radio frequency parameters of the three-port radio frequency device, the prior art generally needs to use a three-port or four-port network analyzer for testing, such as figure 1 As shown, it is a schematic diagram of the test structure of the existing three-port radio frequency device....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/00G01R27/02
Inventor 黄景丰
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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