V type MEMS actuator for detonator protection device based on buckling amplification

A technology of buckling amplification and actuators, applied in fuzes, weapon accessories, offensive equipment, etc., can solve the problems of traditional fuzes such as large size and difficult integration, and achieve the effects of high intelligence, improved adaptability, and reduced costs

Inactive Publication Date: 2014-11-19
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Traditional fuzes have disadvantages such as large size and difficulty in integration

Method used

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  • V type MEMS actuator for detonator protection device based on buckling amplification
  • V type MEMS actuator for detonator protection device based on buckling amplification
  • V type MEMS actuator for detonator protection device based on buckling amplification

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Embodiment Construction

[0019] The present invention will be further described below in conjunction with the accompanying drawings.

[0020] refer to figure 1 , a V-shaped MEMS actuator for a fuze security device based on buckling amplification, comprising a single crystal silicon substrate 1, an accelerating bore 5 with a diameter of 150-180um is fabricated on the single crystal silicon substrate 1, and the accelerating bore 5 It is the channel of the flyer material. The silicon dioxide insulating layer 2 is grown on the single crystal silicon substrate 1 with a growth thickness of 2-3um. The substrate 1 is bonded, the thickness of the monocrystalline silicon structural layer 3 is 50-100um, and the metal electrode layer 4 is deposited on the anchor point 3-2 of the monocrystalline silicon structural layer 3;

[0021] refer to figure 2 , the MEMS actuator is fabricated in the monocrystalline silicon structure layer 3, the MEMS actuator includes an anchor point 3-2, and the two ends of the V-beam t...

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Abstract

The invention discloses a V type MEMS actuator for a detonator protection device based on buckling amplification. The actuator comprises a monocrystalline silicon substrate, wherein accelerating boring holes are formed in the monocrystalline silicon substrate; a silicon dioxide insulating layer grows on the monocrystalline silicon substrate; a monocrystalline silicon structure and the monocrystalline silicon substrate on which the silicon dioxide insulating layer grows are linked; a metal electrode layer is deposited on anchor points of the monocrystalline silicon structure; the MEMS actuator is prepared in the monocrystalline silicon structure; an etching technique is used for preparing a dynamic structure layer; the thermo electric effect is use for generating corresponding output; parts prepared by using a related MEMS-related technique is small in volume and has the advantages of low cost, high intelligence and easiness in integration.

Description

technical field [0001] The invention relates to the field of fuze technology, in particular to a V-shaped MEMS actuator for a fuze security device based on buckling amplification. Background technique [0002] The fuze is a control device (system) that uses target and environmental information to detonate or ignite the charge of the ammunition warhead under predetermined conditions. It is usually installed on rockets, missile warheads, and gun / tank / mortar ammunition, etc., according to the type of ammunition Different fuzes are selected according to different targets and the needs of dealing with targets. The fuze is an important part of the weapon system. It detects the environment and targets to obtain information, process and identify information, and realizes the safety state control and optimal detonation control of the fuze. The basic functions of the fuze are "safety" and "reliable detonation of the warhead". The safety device in the fuze is an important part of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F42C15/00
Inventor 赵玉龙李秀源胡腾江徐文举白颖伟任炜
Owner XI AN JIAOTONG UNIV
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