A Micro-Capacitance Gyro Signal Detection Method Based on Carrier Detection

Abstract

The invention provides a micro-capacitance gyroscope signal detecting method based on carrier wave detection. The method is characterized in that multi-frequency carrier waves are superposed on each electrode couple, at the moment, differential capacitance between a control electrode couple or a detection electrode couple and a gyroscope resonator changes correspondingly in accordance with the vibration state of a gyroscope, and a signal of the gyroscope can be detected by means of detecting the changes of the differential capacitance or can be detected by a frequency division multiplexing signal transmission process. According to the method, a differential capacitance detection process is adopted, and metal imaging of an electrode lead does not need to be performed on a resonator body; a frequency division multiplexing signal detection mode is adopted, and the identification of signal detection on the gyroscope is ensured; electrodes are arranged on a substrate, no resonator lead is required, the processing technology is simplified greatly and the difficulty in gyroscope design and processing is reduced.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical (MEMS) systems, in particular to a method for detecting signals of a microcapacitance gyroscope based on carrier detection. Background technique [0002] As a carrier angular velocity sensitive inertial sensor, gyroscope plays a very important role in attitude control, navigation and positioning in traditional industrial fields such as aviation, aerospace, and shipbuilding. MEMS micro-gyroscopes have the advantages of small size and mass, low power consumption, low cost, good environmental adaptability, and high integration. [0003] With the development of my country's economy, the demand for MEMS micro-gyroscopes with high performance, small size and high reliability in the fields of military, industry and consumer electronics is becoming increasingly urgent. [0004] Patent Publication No. CN102305627B provides an all-solid-state dual-axis gyroscope with a disc-shaped piezoelec...

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Problems solved by technology

[0005] In the above technology, no specific signal detection method is given, and the electrodes are located on the disc-shaped piezoelectric vibrator, which has certain instability and low reliability when the piezoelectric vibrator vibrates at high frequency; at the same time, Due to the need to make electrode leads on the piezoelectric vibrator, the processing technology is relatively complicated, the processing cost is high, and it is difficult to realize, so it is not suitable for mass production

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