A special insulating coating for plasma equipment and its preparation method
An insulating coating and plasma technology, applied in the coating and other directions, can solve the problems of ozone resistance and anti-corrosion, which cannot meet the long-term operation requirements of plasma equipment, and achieve the effect of strong adhesion and excellent insulation performance.
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Embodiment 1
[0020] Insulating coating for plasma equipment, containing the following components in parts by mass: 31 parts of methyl vinyl silicone rubber, 15 parts of polyester modified silicone resin, 10 parts of nano attapulgite, 10 parts of mica powder, 20 parts of butanol, 10 parts of butyl acetate, 3 parts of curing agent, 0.5 parts of stabilizer, and 0.5 parts of silane coupling agent.
[0021] According to the mass ratio, the components are mixed evenly to obtain the finished product, and the finished product is subjected to a performance test. The test results are shown in Table 1, figure 1 and figure 2 .
Embodiment 2
[0023] Insulating coating for plasma equipment, containing the following components in parts by mass: 35 parts of methyl vinyl silicone rubber, 11 parts of polyester modified silicone resin, 10 parts of nano attapulgite, 10 parts of mica powder, 18 parts of butanol, 12 parts of butyl acetate, 3 parts of curing agent, 0.5 parts of stabilizer, and 0.5 parts of silane coupling agent.
[0024] According to the mass ratio, the components are mixed evenly to obtain the finished product, and the finished product is subjected to a performance test. The test results are shown in Table 1, figure 1 and image 3 .
Embodiment 3
[0026] Insulating coating for plasma equipment, containing the following components in parts by mass: 32 parts of methyl vinyl silicone rubber, 14 parts of polyester modified silicone resin, 10 parts of nano attapulgite, 10 parts of mica powder, 15 parts of butanol, 15 parts of butyl acetate, 3 parts of curing agent, 0.5 parts of stabilizer, and 0.5 parts of silane coupling agent.
[0027] According to the mass ratio, the components are mixed evenly to obtain the finished product, and the finished product is subjected to a performance test. The test results are shown in Table 1, figure 1 and Figure 4 .
[0028] It can be seen from Table 1 that the special insulating coating for plasma equipment has excellent acid, alkali and salt resistance, adhesion, flame retardancy and pressure resistance.
[0029] Table 1 performance test data
[0030]
[0031] Depend on Figure 1~4 It can be seen that the special insulating coating for plasma equipment can maintain no cracking or ...
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