A gas micro-flow detection device based on the flow sensing mechanism of scorpion hairs

Abstract

The invention discloses a gas micro-flow detection device based on the flow sensing mechanism of scorpion venomous hairs. Composition, the hair-like rod and the base of the hair-like body are assembled into one body to form a hair-like structure; the lower half of the hair-like base has a conductive coating, and the hair-like base is installed on the surface after the hair-like seat and the elastic connecting film are assembled. In the spherical cavity; the first electrode lead wire is embedded in the surface of the elastic connecting membrane, and when the trichome-like structure swings, it connects with the conductive coating at the base of the trichome-like structure; the hemispherical groove of the trichome-like seat can just support the trichome-like base Swinging freely in it, the base of the trichome-like trichome is assembled into the trichome-like seat, and the two form an equivalent angular displacement variable-area capacitive sensor; the second electrode leads are drawn out from the bottom of the trichome-like trichome and connected to the conductive layer of the trichome-like seat connect. The invention imitates the flow perception structure of scorpion hairs to form an equivalent angular displacement variable area capacitive sensor with high sensitivity.

Description

technical field [0001] The invention belongs to the technical field of gas flow measurement, and in particular relates to a gas micro-flow detection device. The flow velocity or flow rate of the gas to be measured is determined by detecting the swing angle of the vellus-like hair relative to the vellus-like seat. Background technique [0002] It is of great significance to accurately measure gas micro-flow. For example, in order to keep the pressure in the spacecraft cabin normal, it is necessary to carry out leak detection on the cabin and accurately detect the small leak rate flow, which is especially important for long-term manned spacecraft; in the electronics industry and fine chemical industry, precise control of gas is required Micro-flow injection to ensure process quality and product performance stability. [0003] At present, the main gas flow detection includes: mechanical gas flow detection (including membrane gas flow detection and turbine gas flow detection),...

AI Technical Summary

Problems solved by technology

However, the mechanical detection accuracy is low, the device is easy to age and is greatly affected by temperature; the HWA detection must electrically heat the sensor chip, so the power consumption is large and it is not suitable for the detection of flammable and explosive gases; ultrasonic and laser Doppler Velocity and flow detection equipment is complex and expensive, and is generally used in precision measurement laboratories or to calibrate other flow meters, and laser Doppler is not suitable for measuring micro-flow velocity in purification rooms

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