mz-type light intensity modulator with integrated photodetector
A light intensity modulator and photodetector technology, which is applied in the fields of instruments, optics, nonlinear optics, etc., can solve the problems of high production cost, difficult process, complex structure, etc., and achieve the effect of reducing process difficulty and production cost
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[0021] An MZ-type light intensity modulator integrated with a photodetector, the innovation of which is: the MZ-type light intensity modulator integrated with a photodetector includes a MZ-type light intensity modulator chip 1, a photodetector chip 2 and a package The tube shell; the photodetector chip 2 is arranged at the position of the waveguide combining point A on the output side of the MZ type light intensity modulator chip 1; the photosensitive surface of the photodetector chip 2 is opposite to the waveguide combining point A, and The photosensitive surface of the photodetector chip 2 completely covers the waveguide combining point A, and the photosensitive surface and the waveguide combining point A are bonded and fixed by optical glue; The lead-out electrode of the shell is bonded and connected.
[0022] Further, the photodetector chip 2 is a photodetector chip with a back-illuminated structure.
[0023] The working principle of...
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