Smooth large-curvature sample measurement device and method based on fluorescent confocal microscopy

Abstract

The invention discloses a smooth large-curvature sample measurement device and method based on the fluorescent confocal microscopy and relates to the technical field of optical precision measurement, in particular to a device and method for measuring the surface topography of a smooth large-curvature sample through the confocal microscopy. The device comprises an illumination module, a detection module and a coated sample. According to the method, a sample to be measured is made into a coated sample, a fluorescent film on the surface of the sample is excited through the illumination module to emit fluorescence, the surface position of the coated sample is determined by the detection module through the position of the vertex of an axial response curve, finally a three-dimensional scanning image is formed, the film is cleaned, and the state of the sample to be measured before being coated is recovered. With the device and method, the measurement precision and the measurement efficiency can be improved, and the measurement cost can be reduced.

Description

technical field [0001] Measuring device and method for smooth and large curvature samples based on fluorescent confocal microscopy technology Field of optical precision measurement, specifically relates to a device and method for measuring surface topography of smooth and large curvature samples using confocal microscopy technology. Background technique [0002] With the improvement of measurement accuracy requirements in the precision machining and manufacturing industry, the measurement of smooth large-area mirror objects and mirror-like objects has received more and more attention. When measuring such samples by optical three-dimensional sensing method, according to the reflection theorem, a strong optical signal can only be received when the incident light forms a special angle direction, and due to the limitation of the collection objective lens aperture, the measurement resolution decreases. Measurements of the full picture of such samples cannot be accomplished withou...

AI Technical Summary

Problems solved by technology

When measuring such samples by optical three-dimensional sensing method, according to the reflection theorem, a strong optical signal can only be received when the incident light forms a special angle direction, and due to the limitation of the collection objective lens aperture, the measurement resolution decreases. It is not possible to measure the full picture of such samples without increasing the degrees of freedom

Combining traditional confocal microscopy, interferometry, and fringe projection technology with mechanical scanning or multi-angle detection technology can achieve the measurement of the overall appearance of such samples. However, the uncertainty brought about by data fusion caused by mechanical scanning and multi-angle detectors , so that the measurement cannot be completed accurately and efficiently

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