Split type differential silicon micro resonant accelerometer

Abstract

The invention discloses a split type differential silicon micro resonant accelerometer. The split type differential silicon micro resonant accelerometer comprises a glass substrate, a lead layer, a bonding layer and a silicon structure layer, wherein the silicon structure layer is composed of an upper part structure and a lower part structure which are completely symmetrical, and each part structure comprises a mass block, a resonator, a lever amplification mechanism, a supporting beam, an anchoring area and other parts; the two anchoring areas are shared by the upper part structure and the lower part structure only in the middle, and the other structures are completely separated. Each mass block is connected with the corresponding anchoring area through a folding beam, each resonator is located in the middle of the corresponding mass block, an output beam and a pivot beam of a lever mechanism in each lever amplification mechanism are located on the same side of a lever arm, an input beam is located on the other side of the corresponding lever arm, an input beam of each lever is connected with the corresponding mass block, and an output beam of each lever is connected with the corresponding resonator. The split type differential silicon micro resonator accelerometer can not only effectively restrain common mode errors, but also completely eliminate coupling influences of the upper resonator and the lower resonator.

Description

technical field [0001] The invention relates to a split-type differential silicon micro-resonance accelerometer, which belongs to micro-electromechanical system (MEMS) and micro-inertia measurement technology. Background technique [0002] Silicon micro accelerometer is a typical MEMS (Micro Electromechanical system, micro electromechanical system) inertial sensor, its processing technology is compatible with microelectronics processing technology, can realize mass production, has the advantages of small size, light weight, low cost, low energy consumption , high reliability, easy intelligence and digitization, and can meet harsh environment applications, etc., is one of the hot spots in the development of accelerometers today, with important military value and broad civilian prospects. [0003] Silicon micro-accelerometers include resonant, capacitive, force-balanced, piezoelectric, piezoresistive, thermal convection, and tunneling current. The resonant silicon micro-accel...

AI Technical Summary

Problems solved by technology

Since the two resonators share a mass, there is coupling between the two, and there will be a measurement dead zone within a certain measurement range

The two resonators of the unequal fundamental frequency silicon microresonant accelerometer adopt an asymmetric design, although the measurement blind zone can be eliminated in the full range, but the suppression of the common mode error is weakened

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