One-time corrosion process for multi-junction gallium arsenide solar batteries

A technology for solar cells and process methods, which is applied to circuits, photovoltaic power generation, electrical components, etc., can solve the problems of cumbersome wet etching steps of multi-junction gallium arsenide solar cells, and optimize the dicing process and reduce direction finding undercutting. , Improve the effect of corrosion accuracy

Active Publication Date: 2015-03-04
SHANGHAI INST OF SPACE POWER SOURCES
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Problems solved by technology

[0005] The invention solves the problem of complicated wet etching steps of multi-junction gallium arsenide solar cells, adopts a multi-junction gallium arsenide solar cell one-time corrosion process, and one-time corrosion makes isolation gr

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  • One-time corrosion process for multi-junction gallium arsenide solar batteries
  • One-time corrosion process for multi-junction gallium arsenide solar batteries
  • One-time corrosion process for multi-junction gallium arsenide solar batteries

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Embodiment Construction

[0026] The multi-junction gallium arsenide solar cell primary corrosion process of the present invention is as follows: image 3 As shown, the process sequence in each process is: masking of photoresist coating, baking, exposure, development, film hardening, primary corrosion isolation groove / scribing groove, glue removal and cleaning, and drying.

[0027] The primary corrosion working principle of the multi-junction gallium arsenide solar cell of the present invention: nitric acid and hydrobromic acid will react to generate Br 2 and excess Br in the etchant - Complexation to form a more stable corrosion solution. Corrosion process through Br 2 The oxidative complexation of HBr corrodes GaInP, GaAs, Ge and other materials, and the corrosion rate can be adjusted by adding a buffer to the etching solution or changing the proportion of each component of the etching solution.

[0028] The specific process flow of the primary etching process for the multi-junction GaAs solar cel...

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Abstract

The invention belongs to the field of new energy and space power supplies and relates to a one-time corrosion process for multi-junction gallium arsenide solar batteries. Partition grooves/scribing grooves are produced through a single corrosion liquid by one-time corrosion. The process comprises a photo-resist protection process and a one-time corrosion process. Partition groove corrosion is a key process for producing integrated bypass diodes. The process is characterized in that graphs are produced through a photo-resist masking process, and the substrate layer is corroded through the single corrosion liquid by one-time corrosion; front epitaxial layer and back substrate materials can be corroded simultaneously through one-time corrosion; the partition grooves and scribing grooves are produced by one-time corrosion simultaneously; solar batteries can be protected against space damage such as 'hot spot' and the like by the bypass diodes produced through processes of one-time corrosion, electrode evaporation, alloy and the like. The scribing grooves are produced by one-time corrosion and are cut directly, so that the battery electric performance caused by the edge mechanical damage due to direct cutting of the scribing grooves can be prevented.

Description

[0001] technical field [0002] The invention belongs to the field of new energy sources and space power sources, and relates to a primary corrosion process method for isolation grooves / scribing grooves, in particular to a primary corrosion process method for multi-junction gallium arsenide solar cells. Background technique [0003] When the solar cell array is working in space, if a single cell is shaded or abnormally damaged, it will be reverse-biased by the normal working cell and generate heat, affecting the output power of the solar cell array or even causing permanent damage. Bypass diodes are diodes connected in parallel with one or more batteries, which can protect these batteries from failure or damage of the entire string of batteries caused by partial shadows and bad batteries, and play an important role in protecting the normal operation of the solar cell array. Solar cells with integrated bypass diodes have been widely used due to their low soldering losses, hig...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCH01L31/184H01L31/1844Y02E10/544Y02P70/50
Inventor 苏宝法姜德鹏徐建文沈斌雷刚池卫英陆剑锋
Owner SHANGHAI INST OF SPACE POWER SOURCES
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