Micro-electromechanical deformable structure and triaxial multi-degree of freedom micro-electromechanical gyroscope

Abstract

The invention relates to a triaxial multi-degree of freedom micro-electromechanical gyroscope. The triaxial multi-degree of freedom micro-electromechanical gyroscope comprises an inner framework, a middle framework, an outer framework, a linkage part positioned in the inner framework, an annular detection capacitor positioned in the center, an annular polar plate of which outer edge of the annular polar plate is connected with the linkage part, two groups of driving capacitors and two groups of second detection capacitors, wherein the two groups of driving capacitors are symmetrically distributed on the two sides, parallel to an x axis, of the outer framework; the two groups of second detection capacitors are symmetrically distributed on the two sides, parallel to a y axis, of the outer framework. The triaxial multi-degree of freedom micro-electromechanical gyroscope adopts a single structure design, capacitance type electrostatic driving and differential capacitance detection; the driving mode is simple; as the structure is compact, the gyroscope size is reduced; the gyroscope is suitable for massive production, small errors are produced under the influence of temperatures and the processing technology, and great measurement precision and sensitivity can be realized.

Description

technical field [0001] The invention relates to microelectromechanical technology, in particular to a microelectromechanical deformable structure and a three-axis multi-degree-of-freedom microelectromechanical gyroscope. Background technique [0002] Micro Electro Mechanical System (MEMS), referred to as MEMS, is an emerging science and technology developed on the basis of microelectronics technology that integrates micro-machines, micro-sensors, micro-actuators, signal processing, and intelligent control. [0003] In MEMS measurement technology, deformable connection structures are often used, and its design is related to the feasibility of the measurement scheme, and its sensitivity is also related to the accuracy of the measurement. [0004] MEMS gyroscope is an inertial device based on MEMS technology, which is used to measure the angular velocity of object motion. It has the characteristics of small size, high reliability, low cost, and suitable for mass production, so...

AI Technical Summary

Problems solved by technology

[0006] In addition, the performance of MEMS gyroscopes is greatly affected by environmental and process factors: when the ambient temperature changes, the dynamic characteristics of the sensitive structure of the gyroscope will change, causing the natural frequencies of the driving and detection modes to shift, thus changing the driving and sensing modes. Detect mode matching, resulting in differences in gyroscope performance at different ambient temperatures

When there are errors in the processing technology, the actual dynamic characteristics of the gyroscope will also have a large deviation from the design parameters, which will affect the realization of the design performance of the gyroscope.

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