Hierarchical Checking Method of Layout Data
A technology for layout data and inspection methods, applied in electrical digital data processing, special data processing applications, detection of faulty computer hardware, etc., can solve problems such as low efficiency, time-consuming and labor-intensive, economic losses, etc. Effect
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[0037] see figure 1 , the hierarchical inspection method of layout data in this application includes the following steps:
[0038] In the first step, select the corresponding hierarchical design rules according to the process standard of critical dimensions used in the layout data. For example, process standards with critical dimensions of 0.35 μm, 0.18 μm, and 0.13 μm each have a hierarchical design rule. Under the same critical dimension process standard, the design of any semiconductor device follows the same hierarchical design rules. The number, name, and physical meaning of all layers are defined in the layer design rule. Usually, in order to cover as wide a range of design needs as possible, the number of levels defined in the hierarchical design rules is much larger than the number of levels actually used in designing semiconductor devices, so designing semiconductor devices only needs to select some levels in the hierarchical design rules.
[0039] Step 2, classif...
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