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Microfabrication method

A fine processing and process technology, applied in metal processing equipment, manufacturing tools, coatings, etc., can solve the problems of expensive equipment, limited use of processing objects, etc., and achieve the effect of improving color

Active Publication Date: 2015-04-01
DEXERIALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In addition, since the processing target needs to be a flat surface without curvature, the use of the processing target is limited
In addition, when the object to be processed increases in size, the equipment becomes very expensive
[0006] In addition, in Patent Document 5, it is described that the glass is subjected to hole processing after the pigment is attached to the surface, but the pigment must be removed.

Method used

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no. 1 Embodiment approach

[0056] The fine processing method shown as the first embodiment of the present invention includes a coating step of coating a glass precursor on a substrate, and an irradiation step of irradiating the glass precursor with a short-pulse laser. Each process will be described below.

[0057] figure 1 It is a cross-sectional view showing the outline of the coating process. In this coating step, glass precursor 12 is coated on substrate 11 .

[0058] As the base material 11, there is no particular limitation, and any transparent or opaque material can be used. In the present embodiment, a transparent material that transmits laser light is used, and in particular, glass homogeneous to the glass converted from the glass precursor 12 is suitably used.

[0059] As the glass precursor 12, a material having a non-shared electron pair such as an amine group and a molecular structure having light-absorbing capability is used. Specific examples of the glass precursor 12 include perhydr...

no. 2 Embodiment approach

[0069] The fine processing method shown as the second embodiment of the present invention includes a coating step of coating a glass precursor on a substrate, an irradiation step of irradiating the glass precursor with a short-pulse laser, and an oxidation treatment passing irradiation step. Oxidation treatment process to form a fine periodic structure.

[0070] Since the application process and the irradiation process are the same as those of the above-mentioned first embodiment, description thereof will be omitted here.

[0071] In the oxidation treatment step, oxidation treatment forms a molded body having a periodic structure on the surface. Thereby, the color of the colored portion of the fine periodic structure formed by irradiating short-pulse laser light can be improved. Examples of the oxidation treatment include annealing treatment, ultraviolet ray irradiation, plasma treatment, corona treatment, application of an oxidizing agent, and the like.

[0072] Here, the c...

Embodiment

[0092]

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Abstract

A microfabrication method is provided with which it is possible to easily form a fine periodic structure on a surface of any substrate. A glass precursor (12) is applied to a substrate (11), and the glass precursor (12) is irradiated with short-pulse laser light. By the irradiation with short-pulse laser light, the glass precursor (12) is activated to undergo a thermal reaction, and a fine periodic structure can be easily formed on the surface. Furthermore, by oxidizing the substrate on which the fine periodic structure has been formed, the hue of the surface can be improved while maintaining the fine periodic structure.

Description

technical field [0001] The present invention relates to a fine processing method for forming a fine periodic structure on a surface. Background technique [0002] Currently, as a method for processing nanostructures, it has been reported that nanostructures are processed on metal surfaces (see Patent Documents 1 and 2 and Non-Patent Document 1) or semiconductor surfaces (see Patent Documents 3 and Non-Patent Document 2) by irradiating short-pulse laser light. method. In this method, a surface wave is generated on an object irradiated with laser light, and the surface wave interferes with the laser light, whereby a periodic structure having a size of about the wavelength of light can be processed. [0003] Figure 21~Figure 23 It is a cross-sectional view for explaining a method of forming a periodic structure on a metal surface by irradiating a short-pulse laser. Ruo Ru Figure 21 When the metal material 101 is irradiated with short-pulse laser light as shown, the surface...

Claims

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Application Information

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IPC IPC(8): C03C17/27B23K26/18B23K26/402C03C17/02C03C23/00
CPCC03C17/02C03C2218/322C03C2218/32C03C3/06C03C17/245C03C2217/77C03C2218/11C03C23/0025C03C2217/213C03C2217/732Y10T428/24355
Inventor 柴田章广金子直人厨川常元
Owner DEXERIALS CORP
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